Interferometer Device with Segmented Electrodes
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Solution Overview
Problem
Existing Fabry-Pérot interferometers face challenges with parasitic capacitances and power consumption due to membrane mirrors' design, which complicates position detection and prevents 'constant charge' actuation, and can introduce optical quality issues with doping.
Innovation Solution
The interferometer device features a laterally structured electrode spaced from mirrors, with separate subregions connected to different potentials, reducing parasitic capacitances and allowing for improved position detection and 'constant charge' actuation, while maintaining optical quality by minimizing doping in the optical area.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If membrane mirrors with large area conductive material are used for electrostatic actuation, then the mirrors can be actuated, but large parasitic capacitances are generated which complicate position detection and increase power consumption
Solution Approach 1:
The electrode is divided into multiple laterally separated sub-electrodes that can be independently controlled. This segmentation reduces the parasitic capacitance by limiting the area of conductive material near the mirror while maintaining actuation capability through distributed electrostatic forces from multiple smaller electrodes.
Solution Approach 2:
The patent transitions from planar in-plane electrodes to a three-dimensional configuration where electrodes are positioned above or below the mirror plane at a distance. This vertical displacement reduces parasitic capacitance while maintaining actuation effectiveness through the electrostatic field extending across the gap.
2Ease of operation
If uniform doping is applied to the mirror structure for actuation, then electrostatic control is achieved, but optical quality is impaired in the optical region
Solution Approach 1:
Different doping levels are applied to different regions of the mirror structure. The optical region maintains low doping to preserve optical quality, while non-optical regions have higher doping to provide necessary electrical conductivity for actuation. This local differentiation allows both optical performance and electrostatic control to coexist.
3Measurement precision
If laterally structured divided electrodes are used to reduce parasitic capacitance, then position detection is improved, but device complexity increases
Solution Approach 1:
The laterally structured divided electrodes serve multiple functions simultaneously: they provide electrostatic actuation forces, reduce parasitic capacitance, and enable position detection through capacitive sensing. This multi-functionality reduces the need for separate components and mitigates the increase in device complexity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This design reduces parasitic capacitances, enhances position detection, facilitates 'constant charge' actuation, and minimizes power consumption, improving the overall performance and optical quality of the interferometer device.
Implementation Method 1
A voltage is applied between two electrodes located at the level of the two mirrors, causing the two mirrors to move toward each other due to electrostatic attraction
Implementation Method 2
the intermediate layer region is removed in an inner region below the first mirror device and/or below the second mirror device... the electrode is arranged at a distance from the first or the second mirror device... so that the first mirror device and/or the second mirror device can be moved electrostatically
Data Source
Figure 1
Figure 2a~2b
Figure 3~4
AI summary
The invention relates to an interferometer device (1), comprising: a substrate (2); an intermediate layer region (3), which is applied to the substrate (2); a first mirror device (SP1) and a second mirror device (SP2), which are oriented plane-parallel to one another, are spaced apart from one another by a first distance (d12) and are enclosed in or arranged on the intermediate layer region (3), the intermediate layer region (3) being removed below the first mirror device (SP1) and/or below the second mirror device (SP2) in an inner region (IB); and a laterally structured electrode (E), which comprises a first subregion (E1) and at least one second subregion (E2), which is laterally separated from and electrically insulated from the first subregion, which subregions can be connected to different electric potentials, wherein: the electrode (E) is spaced apart from the first or the second mirror device (SP1; SP2) by a second distance (d2); the first subregion (E1) runs in the inner region (IB) and is arranged on the intermediate layer region (3) and the second subregion (E2) runs in an outer region (AB) of the intermediate layer region (3), such that the first mirror device (SP1) and/or the second mirror device (SP2) can be moved electrostatically in the inner region (IB) by means of the first subregion (E1), parallel to the substrate (2), and the first distance (d12) can be varied.