Interferometer Temperature-Dependent Reflector Beam Balance
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Existing interferometer systems with multiple beam splitters require complex and precise alignment, making it difficult to adjust the reflection/transmission ratios, and existing low-coherence interferometers face challenges in optimizing the power ratio between reference and sample beams.
Innovation Solution
Incorporating a continuous variable broadband reflector with a temperature-dependent reflector in the beam splitter to adjust the radiation intensity balance between measurement and reference beams, allowing for precise and continuous adjustments without the need for multiple beam splitters, and using a scanner and processor to generate a correlogram for surface property determination.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If multiple beam splitters are used to adjust reflection/transmission ratios, then different reflective values can be examined, but the device complexity increases and precise alignment is required
Solution Approach 1:
The patent uses a temperature-dependent reflector where the reflection/transmission ratio is continuously adjustable by changing the temperature parameter. This eliminates the need for multiple fixed beam splitters and their complex alignment mechanisms, while still allowing examination of objects with different reflective values through continuous parameter adjustment.
Solution Approach 2:
The patent replaces the mechanical system of multiple beam splitters on a carrier means with a thermal-optical system. Instead of mechanically positioning different beam splitters, the system uses temperature control to dynamically adjust the reflector's properties, substituting mechanical complexity with thermal control.
2Device complexity
If fixed reflection/transmission ratios are used, then the device structure is simpler, but small adjustments of the reflection transmission ratio are difficult
Solution Approach 1:
The patent transforms the static, fixed reflection/transmission ratios into a dynamic system where the ratios can be continuously adjusted. The temperature-dependent reflector allows real-time modification of beam splitting ratios, enabling fine adjustments while maintaining a relatively simple device structure without multiple movable components.
3Device complexity
If the power ratio between reference and sample beam is not optimized, then the interferometer system is simpler, but the interference signal quality deteriorates
Solution Approach 1:
The patent implements a feedback mechanism where the temperature of the temperature-dependent reflector is adjusted based on the detected interference signal quality. The system monitors the interference pattern and dynamically adjusts the temperature to optimize the power ratio between reference and sample beams, ensuring maximum signal quality while maintaining simple device architecture.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution enables precise adjustment of the interference radiation intensity, optimizing the balance between measurement and reference beams, resulting in improved interferometer performance with equal intensity at the detector, reducing complexity and radiation loss.
Implementation Method 1
the continuous variable broadband reflector comprises a temperature dependent reflector which reflectivity is dependent on the temperature
Implementation Method 2
a beam splitter to split the broadband illumination beam in a reference beam for reflection on a reference reflector and a measurement beam for reflection on the surface of the sample
Implementation Method 3
a detector to receive an interference radiation intensity created between the reference beam reflected from the reference reflector and the reflected measurement beam from the surface of the sample to generate an interference signal
Data Source
Figure 1a
Figure 1b~2
Figure 3~4
AI summary
The invention relates to an interferometer system to generate an interference signal of a surface of a sample with: a broadband illuminator to provide a broadband illumination beam; a beam splitter to split the broadband illumination beam in a reference beam for reflection on a reference reflector and a measurement beam for reflection on the surface of the sample; and, a detector to receive an interference radiation intensity created between the reference beam reflected from the reference reflector and the reflected measurement beam from the surface of the sample to generate an interference signal. The interferometer system having a continuous variable broadband reflector in the beam splitter and/or the reference reflector to adjust the broadband radiation intensity balance between the measurement beam and the reference beam.