Laser Interferometer Vibration Modulation for Displacement Measurement

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Solution Overview

Problem

Existing laser interferometers face challenges in accurately demodulating the beat signal for measuring vibration velocity and displacement when the vibration state of the object does not satisfy predetermined conditions, leading to inaccurate measurements.

Innovation Solution

A laser interferometer configuration that includes a light source, an optical modulator with a vibrator to generate modulated laser light, a photodetector to receive interference light, and an optical path length variable section to adjust the optical path length, allowing for precise demodulation of the sample signal and enabling accurate measurement of object displacement and vibration velocity.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If a demodulation process that splits the light reception signal into two and applies separate arithmetic processing is used, then the beat signal can be demodulated, but when the vibration state of the object does not satisfy predetermined conditions, the measurement precision deteriorates

Engineering Contradiction:
Improvebeat signal demodulation accuracyVSAvoidapplicability to various vibration states
Core Design Contradiction:
Measurement precisionVSAdaptability or versatility

Solution Approach 1:

The patent applies parameter changes by modulating the reference light beam frequency using a vibrator (piezo element or quartz crystal resonator) and varying the vibration frequency by changing the voltage. This allows the system to adapt to different vibration states of the object and achieve high-accuracy demodulation across various conditions, resolving the contradiction between measurement precision and adaptability

Inventive Principle:
Principle #35Parameter changes

2Measurement precision

If the frequency of the reference light beam is shifted over time, then the beat signal can be obtained, but the demodulation accuracy deteriorates when the object's vibration state does not meet predetermined conditions

Engineering Contradiction:
Improvedisplacement and vibration velocity measurement accuracyVSAvoidcompatibility with different vibration conditions
Core Design Contradiction:
Measurement precisionVSAdaptability or versatility

Solution Approach 1:

The patent employs dynamics by using a vibrator with variable vibration frequency that can be adjusted by changing the voltage. This dynamic adjustment capability allows the reference light beam frequency shift to adapt to different object vibration states, maintaining high measurement accuracy across various conditions rather than being limited to predetermined vibration states

Inventive Principle:
Principle #15Dynamics

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The configuration enables high-accuracy demodulation of the sample signal, even when the object's vibration state does not meet predetermined conditions, thereby improving the measurement precision of displacement and vibration velocity.

Implementation Method 1

an optical modulator that includes a vibrator and modulates the first laser light by using the vibrator to generate second laser light including a modulated signal

Methodology Applied
Scientific EffectVibration: Vibration

Implementation Method 2

a photodetector that receives interference light between third laser light including a sample signal generated by reflecting the first laser light on an object and the second laser light

Methodology Applied
Scientific EffectInterference: Interference

Implementation Method 3

an optical path length variable section that changes an optical path length of an optical path through which the third laser light propagates

Methodology Applied
Scientific EffectOptical path length modulation:

Data Source

PatentUS11879730B2Laser interferometer having a vibrator to modulate light for displacement and vibration velocity measurement
Publication Date: 2024.01.23 SEIKO EPSON CORP
  • US11879730B2 patent drawing
  • US11879730B2 patent drawing
  • US11879730B2 patent drawing

AI summary

A laser interferometer includes a light source that emits first laser light, an optical modulator that includes a vibrator and modulates the first laser light by using the vibrator to generate second laser light including a modulated signal, a photodetector that receives interference light between third laser light including a sample signal generated by reflecting the first laser light on an object and the second laser light to output a light reception signal, and an optical path length variable section that changes an optical path length of an optical path through which the third laser light propagates.