Interferometric Modulator Non-Transparent Substrate

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Solution Overview

Problem

Microelectromechanical systems (MEMS) devices, such as interferometric modulators, face challenges in achieving a dark state due to substrate reflection, which limits their absorptive capability, and require innovative solutions for improved performance and functionality in displays.

Innovation Solution

The integration of anti-reflective coatings and supplemental lighting, along with decoupling the optical and electromechanical behaviors of interferometric modulators, allows for enhanced reflectivity and absorptive capabilities, and the use of non-transparent substrates to improve manufacturing and optical performance.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Illumination intensity

If a transparent or reflective substrate is used in interferometric modulators, then light transmission and interference effects are enabled, but substrate reflection prevents achieving a dark absorptive state

Engineering Contradiction:
Improvelight transmissionVSAvoidsubstrate reflection
Core Design Contradiction:
Illumination intensityVSObject-affected harmful factors

Solution Approach 1:

The patent converts the harmful substrate reflection into a beneficial effect by using the substrate as a reflective element in the interferometric modulation process. The non-transparent substrate's reflection is harnessed to create the interference pattern necessary for light modulation, transforming a previously harmful factor into a functional component of the device operation.

Inventive Principle:
Principle #22Blessing in disguise (Convert harm into benefit)

Solution Approach 2:

The patent inverts the traditional approach by using a non-transparent substrate instead of a transparent one. This inversion allows the substrate to serve as one of the interfering surfaces in the interferometric modulator, eliminating the need for light transmission through the substrate while still enabling the interference effect necessary for modulation.

Inventive Principle:
Principle #13The other way round (Inversion)

2Object-affected harmful factors

If anti-reflective coatings are added to reduce substrate reflection, then absorptive capability improves, but device complexity and manufacturing steps increase

Engineering Contradiction:
Improvesubstrate reflectionVSAvoiddevice structure
Core Design Contradiction:
Object-affected harmful factorsVSDevice complexity

Solution Approach 1:

The patent extracts and removes the anti-reflective coating layer from the device structure, replacing it with a non-transparent substrate that inherently provides the desired optical properties. This elimination of the coating simplifies the device structure while maintaining the ability to achieve dark absorptive states through the interferometric modulation mechanism.

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

The patent changes the optical parameter of the substrate from transparent to non-transparent, which fundamentally alters the light interaction mechanism. This parameter change eliminates the need for anti-reflective coatings while preserving the interferometric modulation functionality, thereby reducing device complexity.

Inventive Principle:
Principle #35Parameter changes

3Ease of manufacture

If decoupling optical and electromechanical behaviors is implemented, then manufacturing is simplified and optical performance is improved, but device structure becomes more complex

Engineering Contradiction:
Improvemanufacturing processVSAvoiddevice structure
Core Design Contradiction:
Ease of manufactureVSDevice complexity

Solution Approach 1:

The patent segments the device into distinct functional components with separate optimization criteria. The interferometric modulator structure is divided into independent elements that can be optimized for their specific functions, allowing the optical behavior to be decoupled from the electromechanical actuation mechanism. This segmentation enables independent optimization of each component.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent implements a universal design where the interferometric modulator structure serves multiple functions simultaneously. The same structural elements that provide mechanical support and actuation also serve as the optical interference surfaces, eliminating the need for separate components and simplifying the overall device architecture despite the decoupled behavior.

Inventive Principle:
Principle #6Universality (Multi-functionality)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach results in improved display performance by reducing substrate reflection, enabling darker absorptive states and more efficient light utilization, while also simplifying manufacturing and reducing the impact of substrate optical properties on the modulator's functionality.

Implementation Method 1

an interferometric modulator may comprise a pair of conductive plates, one or both of which may be transparent and/or reflective in whole or part and capable of relative motion upon application of an appropriate electrical signal. the position of one plate in relation to another can change the optical interference of light incident on the interferometric modulator

Methodology Applied
Scientific EffectOptical interference: Interference

Data Source

PatentUS7564612B2Photonic MEMS and structures
Publication Date: 2009.07.21 SNAPTRACK INC
  • US7564612B2 patent drawing
  • US7564612B2 patent drawing
  • US7564612B2 patent drawing

AI summary

An optical device includes a non-transparent substrate. The optical device further includes a first optical layer which is at least partially transmissive and at least partially reflective to incident light. The optical device further includes a second optical layer which is at least partially reflective to incident light. The second optical layer is spaced from the first optical layer. At least one of the first optical layer and the second optical layer is movable between a first position with a first distance between the first and second optical layers and a second position with a second distance between the first and second optical layers. Movement of the at least one of the first optical layer and the second optical layer between the first and second positions modulates the reflectivity of the device.