Interferometric Temperature and Thickness Measurement Apparatus
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Solution Overview
Problem
Existing temperature measuring apparatuses face challenges in accurately measuring the temperatures of multiple measurement targets facing opposite each other, such as a semiconductor wafer and an electrode plate, due to complex optical fiber layouts and the need for additional processing steps like forming holes for optical fiber insertion.
Innovation Solution
A temperature/thickness measuring apparatus and method that utilize interference of light to measure temperatures or thicknesses of multiple targets without the need for forming holes, by splitting light into measurement and reference beams, and using these beams to transmit and reflect light through multiple targets, allowing for simultaneous measurement with a simple optical fiber layout.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If optical fibers are used to measure temperatures of multiple measurement targets facing opposite each other, then temperature measurement capability is improved, but optical fiber layout complexity and installation difficulty increase
Solution Approach 1:
The optical fiber is divided into multiple independent segments, each dedicated to measuring a specific measurement target. This segmentation eliminates the need for complex routing where a single fiber must pass through multiple targets, as each fiber segment independently connects to its designated target, thereby simplifying the overall optical fiber layout while maintaining multi-target measurement capability
Solution Approach 2:
A control device serves as an intermediary that receives measurement light from multiple independent optical fiber segments and processes the interference patterns to determine temperatures of all measurement targets. This intermediary approach allows the system to handle multiple targets without requiring a single complex fiber path, reducing layout complexity while preserving measurement precision
2Measurement precision
If holes are formed in measurement targets for optical fiber insertion, then direct measurement access is improved, but manufacturing complexity and processing time increase
Solution Approach 1:
The measurement function is extracted from the measurement targets themselves, eliminating the need to modify the targets by forming holes. Instead of inserting fibers through the targets, the system uses independent optical fiber segments that measure each target externally, thereby maintaining direct measurement access while removing the manufacturing complexity of hole formation and the associated processing time
Solution Approach 2:
The measurement system is segmented into independent optical fiber units, each capable of measuring a specific target without requiring physical penetration or modification of that target. This segmentation allows measurement access to be achieved through independent fiber paths rather than through holes in the targets, simplifying manufacturing while preserving measurement precision
3Productivity
If multiple measurement targets are measured simultaneously, then measurement efficiency is improved, but optical system complexity increases
Solution Approach 1:
The optical measurement system is divided into multiple independent optical fiber segments, with each segment dedicated to measuring a specific measurement target. This segmentation enables simultaneous measurement of multiple targets through parallel, independent optical paths, thereby improving measurement efficiency while avoiding the complexity that would arise from a single integrated optical system attempting to measure multiple targets
Solution Approach 2:
Each optical fiber segment is designed as a universal measurement unit that can independently measure its designated target without requiring complex interactions with other measurement paths. This multi-functionality approach allows the system to achieve simultaneous multi-target measurement through simple, independent fiber segments rather than a complex interconnected optical system
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables accurate and efficient measurement of multiple targets' temperatures or thicknesses simultaneously, reducing installation labor and time, while minimizing costs by eliminating the need for special holes and simplifying the optical fiber layout.
Implementation Method 1
a light source that emits light with a wavelength that allows the light to be transmitted and reflected at the individual measurement targets
Implementation Method 2
a splitter that splits the light from the light source to measurement light and reference light
Implementation Method 3
a measurement light transmitting means for transmitting the measurement light from the splitter to a measurement light radiation position at which the measurement light is radiated toward the plurality of measurement targets so as to be transmitted through the measurement targets
Implementation Method 4
a light receiving means for measuring interference of light manifested by measurement beams reflected from the individual measurement targets and the reference light reflected from the reference light reflecting means
Data Source
AI summary
A measuring apparatus including a light source that emits light with a wavelength that allows the light to be transmitted through and reflected at each measurement target, a splitter that splits the light from the light source into measurement light and reference light, a reference mirror at which the reference light from the splitter is reflected, a mechanism for driving the reference mirror to adjust the optical path length of the reference light reflected from the reference mirror and a mechanism for measuring the interference of the reference light reflected from the reference mirror as the reference light from the splitter is radiated toward the reference mirror and measurement beams reflected from a plurality of measurement targets as the measurement light from the splitter is radiated toward the measurement targets so as to be transmitted through the measurement targets.