Interlock Control Apparatus Multiplexing Signals
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Solution Overview
Problem
Conventional interlock control apparatuses in semiconductor manufacturing apparatuses face complexity in interlock control signals and wiring due to increasing apparatus functions and safety requirements, making it difficult to manage and analyze interlock conditions effectively.
Innovation Solution
An interlock control apparatus with slave and master switching apparatuses that multiplex state detecting signals, reduce signal transmission, and include monitoring interfaces for easy analysis, allowing for simplified structure and adaptable control module changes.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If separate interlock control signals are sent and received between control modules for each interlock factor, then interlock control can be implemented between control modules, but the number of interlock control signals becomes very large and wiring becomes complex
Solution Approach 1:
The patent combines multiple separate interlock control signals into a single multiplexed signal that is transmitted between control modules. Instead of having dedicated wiring for each interlock factor (gas leak, chamber pressure, wafer presence, etc.), the system merges all these signals into one composite signal stream that carries multiple pieces of information simultaneously, thereby reducing wiring complexity while maintaining complete interlock control functionality
Solution Approach 2:
The patent creates a universal signal transmission system where a single communication channel serves multiple functions. The multiplexed signal can carry various types of interlock information (safety status, operational state, alarm conditions) from different control modules through the same transmission medium, making the system adaptable to different interlock scenarios without requiring separate dedicated circuits for each function
2Reliability
If separate interlock control signals are sent and received between control modules for each interlock factor, then interlock control can be implemented between control modules, but the number of interlock control signals becomes very large
Solution Approach 1:
The patent merges multiple separate interlock control signals into a single multiplexed signal that is transmitted between control modules. Instead of having dedicated wiring for each interlock factor (gas leak, chamber pressure, wafer presence, etc.), the system merges all these signals into one composite signal stream that carries multiple pieces of information simultaneously, thereby reducing wiring complexity while maintaining complete interlock control functionality
Solution Approach 2:
The patent introduces a multiplexing/demultiplexing system as an intermediary between control modules. This intermediary mechanism allows multiple signals to be combined into a single transmission channel at the source, and then separated again at the destination, effectively reducing the number of direct signal connections needed between control modules while preserving all original signal pathways
3Reliability
If the interlock control structure becomes complex due to increasing apparatus functions and safety requirements, then safety can be improved, but it becomes difficult to analyze the cause when interlock control has been implemented
Solution Approach 1:
The patent incorporates monitoring interfaces that provide feedback about the state of multiplexed signals and interlock conditions. These interfaces allow operators to observe signal transmission status, identify which specific interlock factors are active, and trace the cause of interlock implementations back to their source conditions, thereby maintaining safety while enabling effective diagnostic capability
Solution Approach 2:
The patent uses visual indicators (such as LED lights or display elements) that change state to reflect different interlock conditions and signal statuses. This visual feedback system allows operators to quickly identify the cause of interlock implementations by observing which indicators are active, making complex safety systems easier to diagnose and analyze without compromising safety functionality
4Reliability
If separate interlock control signals are used for each interlock condition, then interlock control can be implemented, but it has been necessary to newly design or modify the design of the interlock circuit for each of the control modules each time a new semiconductor manufacturing apparatus is developed
Solution Approach 1:
The patent creates a universal signal transmission system where a single communication channel serves multiple functions. The multiplexed signal can carry various types of interlock information (safety status, operational state, alarm conditions) from different control modules through the same transmission medium, making the system adaptable to different interlock scenarios without requiring separate dedicated circuits for each function
Solution Approach 2:
The patent implements a dynamic and flexible signal system that can be reconfigured through software or control logic rather than requiring physical hardware redesign. The multiplexing scheme allows signals to be dynamically assigned and reassigned based on the specific needs of different apparatus configurations, enabling easy adaptation when new semiconductor manufacturing apparatus is developed without modifying the fundamental interlock circuit design
Data Source
AI summary
An interlock control apparatus for a plurality of control modules each of which controls driving of at least one piece of equipment is of a simplified structure. The interlock control apparatus comprises slave switching apparatuses corresponding respectively to the control modules. Each of the slave switching apparatuses comprises a multiplexing apparatus that produces a multiplexed signal by multiplexing state detecting signals each of which indicates any of a plurality of states of a piece of the equipment whose driving is controlled by the corresponding control module, a storage apparatus that stores the multiplexed signal, a reading apparatus that reads out the stored multiplexed signal, a separating apparatus that separates the read out multiplexed signal so as to produce a plurality of separated signals, a transmitting apparatus that transmits a predetermined separated signal out of the separated signals to the control modules other than the corresponding control module, and at least one controller that controls driving of a corresponding piece of the equipment based on the predetermined separated signals.