Interlocked Discontinuous Seal Ring for IC Noise and Crack Prevention
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Solution Overview
Problem
Conventional seal ring structures for integrated circuits either suffer from unwanted noise propagation due to continuous metal walls or allow moisture and crack penetration due to segmented designs with gaps.
Innovation Solution
The development of seal ring structures featuring discontinuous seal walls with interlocked patterns that create non-linear paths around the integrated circuit, preventing both crack propagation and moisture ingress while minimizing noise interference.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a continuous solid metal seal wall is used, then crack propagation and moisture penetration are prevented, but noise/signal crosstalk is generated and propagated
Solution Approach 1:
The continuous seal wall is divided into multiple discontinuous segments arranged in interlocking patterns. Each segment is electrically isolated from others, preventing noise propagation while maintaining the barrier function against cracks and moisture through the geometric interlocking design
2Object-generated harmful factors
If the seal wall is broken into segments to reduce noise, then noise propagation is reduced, but moisture and cracks can penetrate through the gaps
Solution Approach 1:
The protection mechanism transitions from relying solely on continuous linear barriers to using geometric interlocking patterns in two dimensions. The segments are arranged such that their combined geometric configuration creates an effective barrier against moisture and cracks, while the discontinuous nature provides noise isolation
3Reliability
If a continuous ring structure is used, then complete protection against moisture and cracks is achieved, but the structure encircles the chip core creating endless signal paths
Solution Approach 1:
The continuous ring is segmented into multiple discontinuous sections arranged in interlocking patterns. This segmentation breaks the endless signal path while the geometric arrangement of segments maintains the protective barrier function against environmental factors
Data Source
AI summary
A seal ring structure of an integrated circuit including a first discontinuous seal wall circumscribing a first portion of the integrated circuit, the first seal wall forming a first pattern on a substrate, and a second discontinuous seal wall circumscribing a second portion of the integrated circuit, the second seal wall forming a second pattern on the substrate and the second portion being at least partially offset from the first portion, wherein the first pattern of the first seal wall interlocks with the second pattern of the second seal wall such that the patterns are interweaved without intersecting, wherein a space is formed between the seal walls, the space creating a non-linear path to the integrated circuit, and wherein the seal ring structure fully circumscribes the integrated circuit. A method of forming such a seal ring structure is also disclosed.