Interlocking Fuse Array Layout for Semiconductor Density

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Solution Overview

Problem

Current fuse circuit layout designs in semiconductor devices face challenges in achieving higher density due to process tolerance limits, limiting the scalability of semiconductor chip features.

Innovation Solution

The use of interlocking active materials with tapered ends in fuse cells, which reduces the total area occupied by fuse arrays on a semiconductor chip, enabling higher-density fuse arrays by arranging active materials in an interlocking pattern.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If conventional fuse circuit layout designs are used, then manufacturing process tolerance limits are respected, but semiconductor chip feature density and scalability are limited

Engineering Contradiction:
Improveprocess toleranceVSAvoidfuse array density
Core Design Contradiction:
Manufacturing precisionVSQuantity of substance

Solution Approach 1:

The active materials are arranged in an interlocking pattern where tapered ends of adjacent active materials overlap and interlock with each other. This nesting arrangement allows the fuse cells to be packed more tightly, reducing the total area occupied by the fuse array while maintaining manufacturing tolerances through the geometric interlocking of the tapered shapes.

Inventive Principle:
Principle #7Nested doll (Nesting)

Solution Approach 2:

The invention transitions from conventional rectangular or linear fuse cell arrangements to a two-dimensional interlocking pattern using tapered ends. This dimensional change in the layout geometry enables more efficient space utilization and higher density packing of fuse cells on the semiconductor chip.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

2Quantity of substance

If fuse array area is reduced to increase density, then higher-density fuse arrays are achieved, but layout design complexity increases

Engineering Contradiction:
Improvefuse array densityVSAvoidlayout design
Core Design Contradiction:
Quantity of substanceVSDevice complexity

Solution Approach 1:

The active materials feature asymmetric tapered ends rather than symmetric rectangular shapes. This asymmetry in the geometric design enables the interlocking pattern that achieves higher density. The tapered geometry, while asymmetric, provides a systematic and repeatable layout rule that manages design complexity through consistency.

Inventive Principle:
Principle #4Asymmetry

Solution Approach 2:

The fuse array is segmented into individual fuse cells, each containing active materials with tapered ends. This segmentation into modular units with standardized interlocking geometry allows the complex high-density arrangement to be built from simple, repeatable building blocks, managing overall layout complexity.

Inventive Principle:
Principle #1Segmentation

Data Source

PatentUS11942167B2Fuse array layout pattern and related apparatuses, systems, and methods
Publication Date: 2024.03.26 MICRON TECHNOLOGY INC
  • US11942167B2 patent drawing
  • US11942167B2 patent drawing
  • US11942167B2 patent drawing

AI summary

Systems, methods, and apparatuses relating to interlocking transistor active regions are disclosed. An apparatus includes a gate including electrically conductive material and an active material including a doped semiconductor material. A portion of the active material overlapped by the gate has an at least substantially triangular shape. An apparatus includes a plurality of active materials. Each active material includes tapered ends and a plurality of gates. The plurality of active materials is arranged in an interlocking pattern with at least some tapered ends of the active materials interlocking with at least some others of the tapered ends. The plurality of gates overlaps the interlocked tapered ends of the plurality of active materials.