Interlocking P-N Junction Optical Modulators for Low-Loss Silicon Photonics

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Solution Overview

Problem

Existing silicon photonics optical modulators face challenges with high optical loss, reduced Q-factor, and elevated parasitic capacitance due to traditional planar P-N junctions, limiting high-speed modulation efficiency.

Innovation Solution

The formation of a fork-or finger-type P-N junction through self-aligning processes with interlocking fingers in a waveguide region, enhancing modulation efficiency while maintaining low optical loss.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Device complexity

If a traditional planar P-N junction is used, then the device structure is simple, but the optical loss is high and Q-factor is reduced

Engineering Contradiction:
ImproveP-N junction structureVSAvoidoptical loss
Core Design Contradiction:
Device complexityVSLoss of energy

Solution Approach 1:

The patent transitions from a two-dimensional planar P-N junction to a three-dimensional fork-or-finger type structure with interlocking fingers extending vertically. This dimensional change increases the junction surface area by a factor of 2-5 times compared to planar structures, thereby reducing optical loss and improving Q-factor without significantly increasing device footprint.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Solution Approach 2:

The P-N junction is segmented into multiple interlocking fingers rather than forming a single continuous planar junction. Each finger acts as an independent modulation element, and the collective arrangement of multiple fingers provides a larger effective junction area, reducing optical loss while maintaining compatibility with existing silicon photonics fabrication processes.

Inventive Principle:
Principle #1Segmentation

2Ease of manufacture

If a traditional planar P-N junction is used, then the manufacturing process is simple, but the modulation efficiency is low and electrical bandwidth is limited

Engineering Contradiction:
ImproveP-N junction fabricationVSAvoidmodulation efficiency
Core Design Contradiction:
Ease of manufactureVSProductivity

Solution Approach 1:

The patent employs vertical interlocking fingers that extend in the third dimension, increasing the junction surface area and thus the modulation efficiency. The fork-or-finger structure provides a larger active volume for carrier injection and extraction, enabling higher modulation speeds and improved electrical bandwidth while remaining compatible with standard CMOS and silicon photonics fabrication processes.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Solution Approach 2:

The patent introduces locally varied doping concentrations in different regions of the fork-or-finger structure. By optimizing the doping profile in specific areas, the device achieves enhanced carrier concentration and improved modulation efficiency in critical regions while maintaining overall manufacturability through self-aligning fabrication processes.

Inventive Principle:
Principle #3Local quality

3Area of stationary object

If a traditional planar P-N junction is used, then the device footprint is small, but the parasitic capacitance is elevated

Engineering Contradiction:
Improvedevice footprintVSAvoidparasitic capacitance
Core Design Contradiction:
Area of stationary objectVSObject-generated harmful factors

Solution Approach 1:

The patent redistributes the junction structure from a planar two-dimensional arrangement to a three-dimensional fork-or-finger configuration. This vertical arrangement increases the separation between opposing doped regions, reducing the overlap of electric fields and thereby lowering parasitic capacitance. The interlocking finger structure provides effective electrical isolation while maintaining a compact device footprint.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution provides increased modulation efficiency with reduced optical loss and improved electrical bandwidth for high-speed modulation compared to traditional planar P-N junctions.

Implementation Method 1

Applying a bias voltage to the P-N junction changes the charge carrier density of the P-N junction, which changes the refractive index and phase shift

Methodology Applied
Scientific EffectPlasma dispersion effect: Electro-Optic Effects

Data Source

PatentUS20250377560A1Optical modulators for photonics devices and methods therefor
Publication Date: 2025.12.11 TAIWAN SEMICONDUCTOR MANUFACTURING CO LTD
  • US20250377560A1 patent drawing
  • US20250377560A1 patent drawing
  • US20250377560A1 patent drawing

AI summary

An optical modulator and methods of making and using the optical modulator are disclosed herein. The optical modulator includes a set of at least four vertically alternating negatively doped and positively doped interlocking fingers that form a P-N junction diode. The junction has a serpentine or sinusoidal shape which increases the junction surface area present within the same volume. The resulting modulation efficiency is increased significantly. The method for making the P-N junction includes self-alignment of the various components.