Intermediate Connection Member for Probe Card Noise Reduction

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Solution Overview

Problem

In semiconductor device manufacturing, existing inspection apparatuses require multiple electronic components on the probe card for electrical inspections, leading to increased production costs and noise interference due to complex wiring, which complicates the inspection process.

Innovation Solution

An intermediate connection member with a pogo frame and pogo blocks is introduced, allowing electronic components like bypass capacitors to be mounted on substrates or side surfaces, reducing the number of components on the probe card and simplifying the design, while using vacuum attraction for electrical connections.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Adaptability or versatility

If multiple electronic components are mounted on the probe card for electrical inspections, then the inspection functionality is improved, but the production cost increases and noise interference occurs due to complex wiring

Engineering Contradiction:

Improveinspection functionalityVSAvoidwiring complexity

Core Design Contradiction:

Adaptability or versatilityVSDevice complexity

Solution Approach 1:

An intermediate connection member is introduced between the tester and probe card, containing electronic components (bypass capacitor, response waveform correction circuit) that were previously mounted on the probe card. This intermediary structure separates the probe card's probing function from the electronic component functions, reducing wiring complexity and noise interference while maintaining full inspection functionality.

Inventive Principle:

Principle #24Intermediary (Mediator)

2Adaptability or versatility

If multiple electronic components are mounted on the probe card, then the inspection functionality is improved, but the production time increases due to complex assembly

Engineering Contradiction:

Improveinspection functionalityVSAvoidproduction time

Core Design Contradiction:

Adaptability or versatilityVSProductivity

Solution Approach 1:

The system is segmented into distinct functional modules: the probe card handles only probing operations, while the intermediate connection member houses all electronic components (bypass capacitor, response waveform correction circuit). This segmentation allows parallel preparation of components and simplifies assembly, reducing production time while maintaining complete inspection functionality.

Inventive Principle:

Principle #1Segmentation

3Adaptability or versatility

If electronic components are mounted on the probe card, then the inspection capabilities are enhanced, but the noise interference increases affecting measurement precision

Engineering Contradiction:

Improveinspection capabilitiesVSAvoidnoise interference

Core Design Contradiction:

Adaptability or versatilityVSObject-affected harmful factors

Solution Approach 1:

The intermediate connection member acts as an intermediary that physically separates noise-generating electronic components from the sensitive probing interface on the probe card. This spatial separation through the intermediate structure reduces electromagnetic interference and noise coupling, thereby improving measurement precision while preserving enhanced inspection capabilities.

Inventive Principle:

Principle #24Intermediary (Mediator)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration reduces production costs, shortens production time, and minimizes noise interference, enabling stable and efficient electrical inspections by consolidating components and improving wiring efficiency.

Implementation Method 1

a block member including connection members configured to electrically connect the plurality of first terminals and the plurality of second terminals, respectively

Methodology Applied

Scientific EffectElectrical conduction: Conduction (electrical)

Implementation Method 2

a frame member having an insertion hole into which the block member is inserted

Methodology Applied

Scientific EffectMechanical insertion and friction: Friction

Data Source

PatentUS11035883B2Intermediate connection member and inspection apparatus

Publication Date: 2021.06.15 TOKYO ELECTRON LTD

AI summary

There is provided an intermediate connection member provided between a first member having a plurality of first terminals and a second member having a plurality of second terminals to electrically connect the plurality of first terminals and the plurality of second terminals, respectively. The intermediate connection member includes: a block member including connection members configured to electrically connect the plurality of first terminals and the plurality of second terminals, respectively; a frame member having an insertion hole into which the block member is inserted; and an electronic component electrically connected to one of the connection members.