3D Interposer Passive Layout for Heat and EMI Control

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Solution Overview

Problem

Conventional semiconductor devices face challenges in reducing size and increasing efficiency due to the exponential increase in I/O pins and thermal energy management, which affects the performance of processors and memory components, and there is a need for a more efficient use of space and reduced electromagnetic interference.

Innovation Solution

The implementation of a Chip on Wafer on Substrate (CoWoS) architecture with vertically arranged passive and active devices, where magnetic core inductors are placed between the interposer and the substrate, and deep trench capacitors are positioned on opposing sides of the interposer, utilizing through-silicon vias for thermal management and electromagnetic interference reduction.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Length of moving object

If devices are reduced in size to meet consumer demand, then device dimensions decrease, but thermal energy management becomes more difficult and electromagnetic interference increases

Engineering Contradiction:
Improvedevice dimensionsVSAvoidthermal energy management
Core Design Contradiction:
Length of moving objectVSTemperature

Solution Approach 1:

The patent transitions from planar 2D arrangement of components to a three-dimensional vertical stacking architecture. Multiple device layers are stacked vertically with interconnect structures connecting different layers, enabling compact form factor while providing dedicated thermal management pathways and electromagnetic shielding between layers.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Solution Approach 2:

The device is divided into multiple functional layers stacked vertically, with each layer containing specific components. Thermal management is segmented into dedicated thermal vias and heat dissipation structures separate from the active device layers, allowing independent optimization of thermal pathways.

Inventive Principle:
Principle #1Segmentation

2Area of stationary object

If devices are reduced in size through vertical stacking, then space efficiency improves, but manufacturing complexity increases

Engineering Contradiction:
Improvespace efficiencyVSAvoidmanufacturing complexity
Core Design Contradiction:
Area of stationary objectVSDevice complexity

Solution Approach 1:

Interconnect structures such as through-silicon vias and conductive pillars are formed in advance during the semiconductor fabrication process before final device assembly. This preliminary formation of vertical interconnects simplifies subsequent stacking operations and reduces overall manufacturing complexity despite the three-dimensional architecture.

Inventive Principle:
Principle #10Preliminary action

3Adaptability or versatility

If I/O pins are increased exponentially to support more functions, then device functionality improves, but electromagnetic interference and thermal management become more difficult

Engineering Contradiction:
Improvedevice functionalityVSAvoidelectromagnetic interference
Core Design Contradiction:
Adaptability or versatilityVSObject-generated harmful factors

Solution Approach 1:

The patent moves I/O connections from a two-dimensional planar array to a three-dimensional vertical architecture. Multiple I/O connections are distributed across different vertical layers, with electromagnetic shielding and ground structures positioned between layers to reduce interference while maintaining high I/O capacity.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration enhances thermal dissipation, reduces electromagnetic interference, and optimizes space usage, leading to improved performance and reliability of semiconductor devices while maintaining economical fabrication.

Implementation Method 1

utilizing through-silicon vias for thermal management

Methodology Applied
Scientific EffectThermal conduction: Conduction (thermal)

Implementation Method 2

magnetic core inductors are placed between the interposer and the substrate

Methodology Applied
Scientific EffectElectromagnetic induction: Electromagnetic Induction

Implementation Method 3

deep trench capacitors are positioned on opposing sides of the interposer

Methodology Applied
Scientific EffectCapacitance: Capacitance

Data Source

PatentUS20240371787A1Semiconductor device and method of making the same
Publication Date: 2024.11.07 TAIWAN SEMICONDUCTOR MANUFACTURING CO LTD
  • US20240371787A1 patent drawing
  • US20240371787A1 patent drawing
  • US20240371787A1 patent drawing

AI summary

A semiconductor device includes an interposer disposed on a substrate. A first major surface of the interposer faces the substrate. A system on a chip is disposed on a second major surface of the interposer. The second major surface of the interposer opposes the first major surface of the interposer. A plurality of first passive devices is disposed in the first major surface of the interposer. A plurality of second passive devices is disposed on the second major surface of the interposer. The second passive devices are different devices than the first passive devices.