Interposer Package Layout for High-Frequency Signal Integrity

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Solution Overview

Problem

The semiconductor industry faces challenges in achieving high integration density and improved signal and power integrity in semiconductor devices, particularly in Package-on-Package (PoP) technology, due to the limitations of existing packaging techniques.

Innovation Solution

The use of an interposer with metallization layers in organic insulating layers, combined with damascene processes, to form improved signal and power integrity at high operating frequencies, and the integration of metallization patterns in both organic and inorganic insulating materials to enhance flexibility in processing and packaging design.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If traditional packaging techniques are used, then manufacturing simplicity is maintained, but signal and power integrity deteriorate at high operating frequencies

Engineering Contradiction:
Improvesignal and power integrityVSAvoidpackaging structure complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

An interposer is introduced as an intermediary component between the first and second semiconductor packages. The interposer includes a substrate with conductive vias and metallization layers that mediate the electrical connections, improving signal and power integrity by providing controlled impedance pathways and reducing parasitic effects, while isolating the complexity of the high-frequency interconnect structure from both packages.

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The interposer employs composite material structures including organic insulating layers combined with metallization layers, and integrates both organic and inorganic insulating materials. This composite approach enables optimized electrical performance at high frequencies while maintaining mechanical stability and processing flexibility.

Inventive Principle:
Principle #40Composite materials

2Quantity of substance

If integration density is increased through PoP technology, then component density improves, but manufacturing precision requirements worsen

Engineering Contradiction:
Improvecomponent densityVSAvoidalignment precision
Core Design Contradiction:
Quantity of substanceVSManufacturing precision

Solution Approach 1:

The interposer is prepared in advance with pre-formed conductive vias, metallization layers, and organic insulating structures before the semiconductor packages are attached. This preliminary preparation of connection structures enables more tolerant alignment processes during package stacking, reducing the stringency of real-time alignment precision requirements while achieving high component density.

Inventive Principle:
Principle #10Preliminary action

3Speed

If metallization layers are added to improve signal integrity, then operating frequency increases, but device complexity worsens

Engineering Contradiction:
Improveoperating frequencyVSAvoidmetallization structure complexity
Core Design Contradiction:
SpeedVSDevice complexity

Solution Approach 1:

Metallization layers are strategically placed only in specific regions of the interposer where high-frequency signal and power distribution is required. The organic insulating layers are selectively positioned to provide electrical isolation and mechanical support, creating a structure with locally optimized properties that achieves high operating frequency without uniformly increasing overall device complexity.

Inventive Principle:
Principle #3Local quality

Data Source

PatentUS20250316585A1Integrated circuit package and method
Publication Date: 2025.10.09 TAIWAN SEMICONDUCTOR MANUFACTURING CO LTD
  • US20250316585A1 patent drawing
  • US20250316585A1 patent drawing
  • US20250316585A1 patent drawing

AI summary

A device package including an interposer. The interposer comprising: a semiconductor substrate; first through vias extending through the semiconductor substrate; an interconnect structure comprising: a first metallization pattern in an inorganic insulating material; and a passivation film over the first metallization pattern; and a first redistribution structure over the passivation film. The first redistribution structure comprising a second metallization pattern in an organic insulating material. The device package further including an integrated circuit die over and attached to the interposer; and a first encapsulant around the integrated circuit die.