Intersecting Vent Plate Module for Clean Vacuum Particle Removal
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Solution Overview
Problem
Existing semiconductor processing apparatuses are inadequate in maintaining a clean vacuum environment, leading to contamination and reduced semiconductor wafer yield due to inefficient particle removal during the vacuum creation process.
Innovation Solution
The processing apparatus incorporates an intersecting module with multiple support members and internal ventilating plates arranged in a staggered and inclined manner to filter out contaminants from the gas flow, ensuring a clean vacuum is maintained and preventing particle contamination of the pump and wafer.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If existing processing apparatus are used to create vacuum, then vacuum is created, but particles are not effectively removed leading to contamination
Solution Approach 1:
The patent introduces an intersecting module with ventilating plates as an intermediary component between the processing chamber and pump. This module actively removes particles from the gas flow through its structured design, preventing particle contamination while maintaining vacuum quality. The ventilating plates act as a mediator that separates the harmful particle removal function from the vacuum creation process.
Solution Approach 2:
The patent extracts the particle removal function from the traditional vacuum creation process. By incorporating a dedicated intersecting module with ventilating plates, the system separates particle removal from simple vacuum pumping, allowing each component to specialize in its primary function while working together to achieve both clean vacuum and particle elimination.
2Productivity
If traditional pump systems are used, then gas is exhausted, but particles contaminate the pump and reduce uptime
Solution Approach 1:
The intersecting module performs preliminary particle removal before gas enters the pump system. By proactively eliminating particles from the gas flow upstream, the system prevents particle accumulation in the pump, thereby extending pump life and maintaining apparatus uptime without requiring frequent maintenance or pump replacement.
3Productivity
If scaling-down process is implemented, then production efficiency increases, but manufacturing complexity increases
Solution Approach 1:
The patent segments the vacuum processing system into distinct functional modules: the processing chamber, the intersecting module with ventilating plates, and the pump system. This segmentation allows each component to be optimized independently for its specific function while maintaining overall system efficiency. The modular design simplifies manufacturing and maintenance despite the advanced functionality required for scaled-down production.
Data Source
AI summary
An intersecting module is provided. The intersecting module includes a plurality of internal ventilating plates. The internal ventilating plates have a plurality of orifices and include a first group of internal ventilating plates, a second group of internal ventilating plates, and a third group of internal ventilating plates arranged along a longitudinal direction. The second group of internal ventilating plates are positioned between the first group of internal ventilating plates and the third group of internal ventilating plates in the longitudinal direction. The first group of internal ventilating plates and the second group of internal ventilating plates are arranged in a staggered manner, and the second group of internal ventilating plates and the third group of internal ventilating plates are also arranged in a staggered manner.