Inversion Bit Lines in Virtual Ground Array Memory Structures

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Solution Overview

Problem

Conventional virtual ground array structures in non-volatile memory products, such as flash memory, are limited in cell size reduction due to the necessity of implanted bit lines, which occupy valuable area and hinder further miniaturization and increased density.

Innovation Solution

The use of inversion bit lines replaces implanted bit lines, allowing for reduced cell size by eliminating the need for these lines and enabling smaller packaging and greater densities.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If implanted bit lines are used in virtual ground array structures, then reliable bit line conduction is achieved, but cell size cannot be reduced further due to the area occupied by implanted bit lines

Engineering Contradiction:
Improvebit line conduction reliabilityVSAvoidcell size
Core Design Contradiction:
ReliabilityVSArea of moving object

Solution Approach 1:

The patent extracts and removes the implanted bit lines from the virtual ground array structure, replacing them with inversion bit lines formed in the substrate. This extraction eliminates the area occupation problem of implanted bit lines while maintaining the essential bit line conduction function through the inversion layer formed by voltage application.

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

The patent changes the operational parameter of bit line formation from physical implantation to electrical inversion. By applying appropriate voltages to create inversion layers in the substrate, the bit lines are formed dynamically rather than through fixed implanted structures, thereby reducing the required cell area while preserving conduction reliability.

Inventive Principle:
Principle #35Parameter changes

2Ease of manufacture

If implanted bit lines are used in virtual ground array structures, then proper bit line formation is achieved, but further miniaturization and increased density are hindered

Engineering Contradiction:
Improvebit line formationVSAvoidmemory density
Core Design Contradiction:
Ease of manufactureVSProductivity

Solution Approach 1:

The patent transitions from static implanted bit lines to dynamic inversion bit lines that are formed electrically during operation. This dynamic approach allows the bit lines to be created only when needed through voltage application, reducing the permanent area requirement and enabling higher memory density while maintaining manufacturability through standard voltage programming sequences.

Inventive Principle:
Principle #15Dynamics

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The implementation of inversion bit lines in virtual ground array structures achieves reduced cell size, enhancing memory product densities and packaging efficiency by eliminating the area required for implanted bit lines, thereby supporting smaller and more compact designs.

Implementation Method 1

conduction paths are formed by inversion in a substrate

Methodology Applied
Scientific EffectElectrical inversion:

Data Source

PatentUS7947607B2Apparatus and associated method for making a virtual ground array structure that uses inversion bit lines
Publication Date: 2011.05.24 MACRONIX INTERNATIONAL CO LTD
  • US7947607B2 patent drawing
  • US7947607B2 patent drawing
  • US7947607B2 patent drawing

AI summary

A virtual ground array structure uses inversion bit lines in order to eliminate the need for implanted bit lines. As a result, the cell size can be reduced, which can provide greater densities and smaller packaging.