IC I/O Opening Moisture Sensor Layout for Early Ingress Detection

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Solution Overview

Problem

Existing moisture detection techniques for integrated circuits (ICs) are often inaccurate, lack sensitivity, or require destructive tests, leading to late detection of moisture ingress, which can result in chip failure.

Innovation Solution

The implementation of a plurality of moisture sensors along the edge of an input/output (I/O) opening in an IC structure, positioned between a primary guard ring and a moisture barrier, allows for early and definitive detection of moisture ingress.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Device complexity

If single moisture sensors are used at an outer end of a long optical I/O opening, then device complexity is reduced, but moisture detection precision deteriorates leading to premature indications

Engineering Contradiction:
Improvenumber of moisture sensorsVSAvoidmoisture detection precision
Core Design Contradiction:
Device complexityVSMeasurement precision

Solution Approach 1:

The patent divides the moisture detection function into multiple segments by placing several moisture sensors at different positions along the I/O opening (e.g., at the outer end, inner end, and intermediate positions). This segmentation allows precise localization of moisture ingress and prevents premature false indications that would occur with a single sensor, while maintaining manageable device complexity through systematic arrangement.

Inventive Principle:
Principle #1Segmentation

2Duration of action of moving object

If moisture sensors are placed close to the I/O opening for early detection, then duration of action is reduced allowing earlier remedial action, but reliability deteriorates due to premature indications

Engineering Contradiction:
Improvedetection timingVSAvoiddetection reliability
Core Design Contradiction:
Duration of action of moving objectVSReliability

Solution Approach 1:

The patent implements preliminary moisture detection by placing sensors at multiple strategic positions along the I/O opening before moisture can reach critical components. The system monitors moisture progression sequentially from the outer end toward the inner end, enabling early warning and remedial action while maintaining reliability through cross-validation across multiple sensor positions that distinguish actual moisture ingress from environmental humidity.

Inventive Principle:
Principle #10Preliminary action

3Measurement precision

If multiple moisture sensors are distributed along the I/O opening edge, then measurement precision is improved for accurate moisture localization, but device complexity increases

Engineering Contradiction:
Improvemoisture localization precisionVSAvoidsensor distribution complexity
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The patent applies local quality by concentrating moisture sensors specifically along the edge of the I/O opening where moisture ingress most commonly occurs, rather than distributing them uniformly throughout the entire device. This targeted placement achieves high moisture localization precision at the critical interface between the external environment and internal circuitry, while minimizing overall device complexity by focusing sensing resources where they are most needed.

Inventive Principle:
Principle #3Local quality

Data Source

PatentUS12265048B2Moisture detection along input/output opening in IC structure
Publication Date: 2025.04.01 GLOBALFOUNDRIES US INC
  • US12265048B2 patent drawing
  • US12265048B2 patent drawing
  • US12265048B2 patent drawing

AI summary

An integrated circuit (IC) structure includes a substrate; and a plurality of moisture sensors along an edge of an optical input/output (I/O) opening in the substrate. The plurality of moisture sensors are positioned between a primary guard ring and a moisture barrier. The moisture sensors may detect moisture in a sequential manner to monitor moisture ingress and predict when remedial action is necessary. The teachings of the disclosure may be applicable to any IC structure including an I/O opening, and in particular, IC structures that have elongated I/O openings such as photonic integrated structures (PICs) with optical I/O openings for photonics components, e.g., an optical fiber or an external laser. The moisture sensors provide an early and definitive alarm for moisture, with no false alarms. The system accurately predicts time to failure and allows adjustment based on real time field data input.