IC I/O Opening Moisture Sensor Layout for Early Ingress Detection
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Solution Overview
Problem
Existing moisture detection techniques for integrated circuits (ICs) are often inaccurate, lack sensitivity, or require destructive tests, leading to late detection of moisture ingress, which can result in chip failure.
Innovation Solution
The implementation of a plurality of moisture sensors along the edge of an input/output (I/O) opening in an IC structure, positioned between a primary guard ring and a moisture barrier, allows for early and definitive detection of moisture ingress.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Device complexity
If single moisture sensors are used at an outer end of a long optical I/O opening, then device complexity is reduced, but moisture detection precision deteriorates leading to premature indications
Solution Approach 1:
The patent divides the moisture detection function into multiple segments by placing several moisture sensors at different positions along the I/O opening (e.g., at the outer end, inner end, and intermediate positions). This segmentation allows precise localization of moisture ingress and prevents premature false indications that would occur with a single sensor, while maintaining manageable device complexity through systematic arrangement.
2Duration of action of moving object
If moisture sensors are placed close to the I/O opening for early detection, then duration of action is reduced allowing earlier remedial action, but reliability deteriorates due to premature indications
Solution Approach 1:
The patent implements preliminary moisture detection by placing sensors at multiple strategic positions along the I/O opening before moisture can reach critical components. The system monitors moisture progression sequentially from the outer end toward the inner end, enabling early warning and remedial action while maintaining reliability through cross-validation across multiple sensor positions that distinguish actual moisture ingress from environmental humidity.
3Measurement precision
If multiple moisture sensors are distributed along the I/O opening edge, then measurement precision is improved for accurate moisture localization, but device complexity increases
Solution Approach 1:
The patent applies local quality by concentrating moisture sensors specifically along the edge of the I/O opening where moisture ingress most commonly occurs, rather than distributing them uniformly throughout the entire device. This targeted placement achieves high moisture localization precision at the critical interface between the external environment and internal circuitry, while minimizing overall device complexity by focusing sensing resources where they are most needed.
Data Source
AI summary
An integrated circuit (IC) structure includes a substrate; and a plurality of moisture sensors along an edge of an optical input/output (I/O) opening in the substrate. The plurality of moisture sensors are positioned between a primary guard ring and a moisture barrier. The moisture sensors may detect moisture in a sequential manner to monitor moisture ingress and predict when remedial action is necessary. The teachings of the disclosure may be applicable to any IC structure including an I/O opening, and in particular, IC structures that have elongated I/O openings such as photonic integrated structures (PICs) with optical I/O openings for photonics components, e.g., an optical fiber or an external laser. The moisture sensors provide an early and definitive alarm for moisture, with no false alarms. The system accurately predicts time to failure and allows adjustment based on real time field data input.


