Ion Balance Sensor with Environmental Detection
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Solution Overview
Problem
Current static elimination systems in manufacturing environments, such as semiconductor and liquid crystal display device manufacturing, face challenges in effectively neutralizing static electricity due to inadequate ion balance measurement and environmental adjustments, particularly when the nozzle orientation is incorrect or the temperature and humidity conditions are unfavorable.
Innovation Solution
An ion balance sensor system that includes a conductive detection plate, a first information generation unit for detecting ion balance, a second information generation unit for detecting environmental parameters like temperature and humidity, and a sensor communication unit to output these signals to a static eliminator, allowing for precise adjustments based on real-time data.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If only ion balance measurement is implemented without environmental parameter detection, then the measurement system remains simple, but the ability to optimize static elimination conditions is insufficient
Solution Approach 1:
The detection plate is designed to serve multiple functions: it detects ion balance through potential measurement and simultaneously detects environmental parameters (temperature, humidity) through integrated sensors. This multi-functional design allows the system to gather comprehensive data for optimizing static elimination conditions without requiring separate measurement systems.
Solution Approach 2:
The patent combines the ion balance detection function with environmental parameter detection functions into a single integrated detection system. The detection plate structure integrates temperature sensors and humidity sensors, merging multiple measurement capabilities into one unified device that can comprehensively monitor both ion balance and environmental conditions.
2Loss of information
If environmental parameters are monitored in addition to ion balance, then comprehensive environmental data is obtained, but the device complexity increases
Solution Approach 1:
The patent merges multiple detection functions into a single integrated detection plate structure. Temperature sensors and humidity sensors are integrated with the ion balance detection plate, allowing comprehensive environmental monitoring through one unified device rather than multiple separate sensors, thereby reducing overall system complexity.
Solution Approach 2:
The detection plate is designed as a multi-functional universal sensor that simultaneously performs ion balance measurement and environmental parameter detection. This universal design consolidates multiple measurement capabilities into a single component, reducing the number of separate devices needed and simplifying the overall system architecture.
3Productivity
If static elimination is performed without considering environmental conditions, then the elimination process is simple and fast, but the elimination accuracy decreases
Solution Approach 1:
The system implements feedback control by continuously monitoring ion balance and environmental parameters, then using this data to dynamically adjust static elimination conditions. The detection results feed back to the static elimination device, enabling real-time optimization of elimination accuracy while maintaining efficient operation through automated control.
Solution Approach 2:
The system dynamically changes operating parameters (ion supply amount, temperature, humidity) based on detected environmental conditions and ion balance measurements. By adjusting these parameters in real-time according to actual measurements, the system maintains high elimination accuracy across varying environmental conditions without sacrificing productivity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The system enhances the accuracy of static electricity neutralization by providing comprehensive environmental data, enabling optimal ion balance and static elimination conditions, thus improving product yield and efficiency in manufacturing processes.
Implementation Method 1
a first information generation unit that detects ion balance in the target space based on a potential of the detection plate
Implementation Method 2
a modulation voltage source that is electrically connected to a node, electrically connected to the detection plate, via the fixed resistor and generates a modulation voltage having periodicity
Data Source
AI summary
To provide an ion balance sensor and a static elimination system capable of grasping further information regarding an environment of a target space in addition to ion balance in the target space. The ion balance sensor includes a detection plate that is conductive and arranged in a target space. In the ion balance sensor, ion balance in the target space is detected based on a potential of the detection plate. An ion balance signal indicating a detection result is generated. Further, a physical quantity related to an environment of the target space is detected in addition to the ion balance. Another signal indicating information regarding the environment of the target space is generated based on a detection result. The ion balance signal and the other signal are output.