Ion Beam Angle Measurement Using Orthogonal Faraday Scans
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Solution Overview
Problem
Existing processing systems lack the ability to accurately determine the angle of incidence of an ion beam impacting a workpiece, especially at angles other than perpendicular, which is crucial for processes like etching and ion implantation.
Innovation Solution
A processing system incorporating a current measurement device, such as Faraday sensors, movable in two orthogonal directions, scans to determine the angle of incidence by measuring maximum current at different positions, using a controller to calculate the angle based on positional data.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If a fixed current measurement device is used to measure ion beam angle, then the device structure is simple, but the measurement precision is insufficient for large angles
Solution Approach 1:
The current measurement device is made movable along the ion beam path, transforming from a fixed to a dynamic measurement system. The device can be positioned at multiple locations to capture angle information, enabling precise measurement of large angles through coordinated movement and data processing
Solution Approach 2:
A controller serves as an intermediary that coordinates the movement of the current measurement device, processes the collected current data from multiple positions, and calculates the angle of incidence. This intermediary component integrates the measurement process and enables precise angle determination
2Measurement precision
If multiple measurement positions are used to improve angle measurement accuracy, then the measurement precision improves, but the measurement time increases
Solution Approach 1:
The system pre-determines optimal measurement positions along the ion beam path before actual measurement begins. The controller plans the movement sequence in advance, allowing the current measurement device to efficiently visit only the necessary positions rather than performing exhaustive measurements
Solution Approach 2:
The system uses feedback from current measurements at each position to determine whether additional measurements are needed. The controller analyzes the data collected and adjusts the measurement process dynamically, reducing unnecessary measurements while maintaining precision
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Accurately measures the angle of incidence with high precision, enabling process tuning and characterization, and can adjust the ion beam angle to achieve desired incidence, suitable for large angles and various workpiece materials.
Implementation Method 1
A current measurement device, such as one or more Faraday sensors, that may be moved in at least two orthogonal directions
Data Source
AI summary
A processing system that includes an ion source to direct an ion beam at a workpiece, and an angle measurement system, is disclosed. The angle measurement system includes a current measurement device, such as one or more Faraday sensors, that may be moved in at least two orthogonal directions. The current measurement device scans in a first direction, seeking the largest current measurement. The current measurement device then moves to a second position in the second direction and repeats the scanning procedure. Based on data collected at two different locations in the second direction, the angle of incidence of the incoming ion beam may be determined.