Ion Beam Angle Measurement Device Using Segmented Electrodes
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Solution Overview
Problem
Current ion implantation apparatuses face challenges in accurately measuring the center of gravity of an ion beam's angle distribution due to the need for multiple beam detectors, which increases measurement time and costs.
Innovation Solution
An ion implantation apparatus with a measurement device comprising a slit and multiple electrode bodies arranged in the width direction of the slit, where each electrode body has a beam measurement surface exposed to the ion beam, allowing for precise measurement of the angle distribution without gaps between adjacent surfaces.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If multiple beam detectors are used to measure the angle distribution of the ion beam, then the measurement precision is improved, but the measurement time increases and costs increase
Solution Approach 1:
The measurement device divides the detection function into multiple electrode bodies (first, second, third electrode bodies) arranged at different positions along the beam traveling direction. Each electrode body has beam measurement surfaces that detect different angular components of the ion beam, enabling simultaneous multi-point measurement of the angle distribution without requiring sequential measurements with multiple detectors.
Solution Approach 2:
The patent transitions from arranging detectors side-by-side in a single plane to arranging electrode bodies along the beam traveling direction (depth dimension). This three-dimensional arrangement allows multiple beam measurement surfaces to detect different angular components simultaneously, improving measurement precision while reducing measurement time by eliminating sequential measurement requirements.
2Measurement precision
If multiple beam detectors are used to measure the angle distribution, then the measurement precision is improved, but the device complexity and costs increase
Solution Approach 1:
The patent combines multiple detection functions into a single integrated measurement device. Multiple electrode bodies with beam measurement surfaces are arranged within one device housing, allowing simultaneous detection of different angular components of the ion beam. This unified structure reduces device complexity compared to using multiple separate beam detectors, while maintaining high measurement precision.
3Measurement precision
If beam measurement surfaces are arranged without gaps, then the measurement precision is improved, but the device complexity increases
Solution Approach 1:
The continuous beam measurement surface is segmented into multiple discrete surfaces on different electrode bodies (first, second, third electrode bodies). These segmented surfaces are positioned at different locations along the beam traveling direction, allowing them to detect different angular components of the ion beam while collectively providing comprehensive angle distribution measurement without gaps.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration enables accurate measurement of the ion beam's angle distribution, improving measurement efficiency and reducing costs by allowing for precise determination of the center of gravity with a smaller number of detectors.
Implementation Method 1
a plurality of electrode bodies which are provided at positions away from the slit in the beam traveling direction, and each of which includes a beam measurement surface that is a region which is exposed to the ion beam having passed through the slit
Data Source
AI summary
An angle measurement device includes: a slit through which an ion beam is incident, and a width direction of which is orthogonal to a beam traveling direction of the ion beam toward a wafer; and a plurality of electrode bodies which are provided at positions away from the slit in the beam traveling direction, and each of which includes a beam measurement surface that is a region which is exposed to the ion beam having passed through the slit. The plurality of electrode bodies are disposed such that the beam measurement surfaces of the electrode bodies are arranged in order in the width direction of the slit and the beam measurement surfaces adjacent to each other in the width direction of the slit deviate from each other in the beam traveling direction.