Focused Ion Beam Optics With Blocking Member for Accurate Mode Switching
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Solution Overview
Problem
Focused ion beam devices face challenges in maintaining positional accuracy during switching between observation and processing modes due to beam diameter expansion from optics aberrations, requiring multiple beam current processes and compromising throughput, and existing systems suffer from accuracy and reproducibility issues with mask and optical condition switching.
Innovation Solution
A focused ion beam device with a drive mechanism that switches the blocking of an ion beam through a diaphragm member while maintaining predetermined optical conditions, using a blocking member with a knife-edge shape to adjust the beam's cross-sectional shape between arched or semi-circular and circular, improving positional accuracy by preventing deterioration during mode switching.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If the beam current is lowered sequentially from large current to medium current to low current to fabricate a plane with sharp edges, then the manufacturing precision is improved, but the productivity deteriorates due to multiple processes being required
Solution Approach 1:
The patent applies a movable blocking member that can dynamically adjust the beam cross-sectional shape from circular to arched/semi-circular during processing. This dynamic shape change allows the system to maintain sharp edges with large beam current throughout the entire processing operation, eliminating the need for sequential current reduction steps and thereby maintaining high productivity while achieving excellent edge sharpness
Solution Approach 2:
The patent changes the physical parameter of beam cross-sectional shape (from circular to arched/semi-circular) to resolve the contradiction. By controlling the blocking member position, the beam shape is modified to concentrate the ion beam energy distribution, enabling sharp edge fabrication with large current and avoiding the need for multiple processing steps with different currents
2Measurement precision
If the shape of the mask aperture is switched between observation mode and processing mode, then the measurement precision is improved, but the manufacturing precision deteriorates due to displacement caused by mask switching
Solution Approach 1:
The patent extracts the shape control function from a physical mask with multiple apertures and implements it through a movable blocking member that can be positioned continuously. This eliminates the need to switch between different mask configurations, removing the source of displacement errors while maintaining the ability to control beam shape for both observation and processing modes
Solution Approach 2:
The movable blocking member serves multiple functions: it controls beam shape for processing, enables observation mode operation, and maintains positional accuracy across different operating modes. This single component replaces the need for multiple mask configurations, ensuring consistent positioning accuracy while providing both observation and processing capabilities
3Adaptability or versatility
If the optical conditions are switched between focusing mode and projection mode to generate images and process samples, then the adaptability is improved, but the manufacturing precision deteriorates due to lens voltage changes
Solution Approach 1:
The patent implements dynamic control of the blocking member position to adjust beam shape in real-time during mode transitions. This dynamic adjustment compensates for optical condition changes, maintaining beam irradiation position accuracy when switching between observation and processing modes, thereby resolving the contradiction between adaptability and manufacturing precision
4Measurement precision
If a mask with multiple differently shaped apertures is used to generate images in observation mode, then the measurement precision is improved, but the device complexity increases
Solution Approach 1:
The patent extracts the aperture shape control function from a complex multi-aperture mask and implements it through a simple single blocking member that can be moved to different positions. This simplifies the mask structure to a single component while maintaining the ability to generate different beam shapes for high-quality imaging in observation mode
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution enhances the positional accuracy and reproducibility of ion beam processing by maintaining optical conditions, allowing for efficient cross-section processing with sharp edges and reduced image blurring from aberrations, thereby improving processing efficiency and throughput.
Implementation Method 1
an ion source that generates an ion beam; an optics that irradiates a sample with the ion beam
Implementation Method 2
a blocking member that blocks a portion of the ion beam passing through the through-hole of the diaphragm member
Data Source
AI summary
An ion beam tube of a composite beam device is provided with an ion source and an ion optics. The ion optics is provided with a diaphragm member in which at least one through-hole that is switchable in order to pass part of an ion beam generated from the ion source therethrough is formed. The ion optics is provided with a blocking member that blocks part of the ion beam passing through the through-hole of the diaphragm member, and a blocking drive mechanism that drives the blocking member. The blocking drive mechanism performs switching between the presence and absence of blocking of the ion beam passing through the through-hole of the diaphragm member by the blocking member in a state where the ion optics maintains a predetermined optical condition.