Ion Beam Cooling Device with Cold Finger and Auto Refill
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Solution Overview
Problem
Current ion beam etching systems face challenges with insufficient cooling capacity, limited coolant supply, and manual refilling requirements, which hinder long-term unattended operation and increase safety concerns due to the need for constant monitoring and refilling of coolant.
Innovation Solution
A cooling device with a cold finger thermally connected to the sample table and a coolant container, allowing for automatic coolant flow control via a pump or valve, enabling larger coolant capacity and eliminating the need for manual refilling, with heat-conducting elements ensuring effective thermal contact and simultaneous cooling of the sample and mask holder.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Power
If liquid nitrogen cooling is used to achieve high cooling performance, then cooling capacity is improved, but refrigerant safety regulations and manual refilling requirements worsen
Solution Approach 1:
The system uses a level indicator to automatically detect coolant levels and triggers automatic refilling when the level is low, eliminating the need for manual monitoring and refilling operations. The system serves itself by automatically managing the coolant supply.
Solution Approach 2:
The level indicator provides continuous feedback on the coolant level in the coolant reservoir, allowing the control system to automatically initiate refilling operations when needed, creating a closed-loop control system that maintains optimal coolant levels without manual intervention.
2Duration of action of moving object
If the coolant reservoir is made larger to extend operation duration, then duration of action is improved, but device complexity and safety regulations worsen
Solution Approach 1:
The automatic refilling system with level indicator and control system eliminates the need for manual coolant management, allowing the use of larger coolant reservoirs without increasing operational complexity. The system automatically handles the coolant supply, reducing the burden on operators.
Solution Approach 2:
The manual mechanical refilling process is replaced with an automated control system that uses electrical signals from the level indicator to trigger refilling operations, substituting manual mechanical operations with an automated control mechanism.
3Reliability
If constant manual monitoring and refilling is implemented, then coolant supply reliability is improved, but loss of time and operator safety worsen
Solution Approach 1:
The level indicator provides continuous feedback on coolant levels, automatically detecting when refilling is needed and triggering the refilling process, eliminating the need for constant manual monitoring while maintaining reliable coolant supply.
Solution Approach 2:
The automatic refilling system ensures continuous coolant supply by automatically replenishing the coolant reservoir when levels are low, maintaining uninterrupted cooling operation without requiring manual intervention that would cause time losses.
4Manufacturing precision
If the sample is cooled during ion beam etching, then manufacturing precision is improved, but device complexity worsens
Solution Approach 1:
The cooling system is integrated with the sample table and mask holder device, combining multiple cooling functions into a unified system that cools both the sample and mask holder simultaneously, reducing overall system complexity while maintaining high manufacturing precision.
Solution Approach 2:
The cooling system serves multiple functions by cooling both the sample table and the mask holder device through the same coolant circulation system, eliminating the need for separate cooling systems and reducing overall device complexity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables extended, unattended operation of ion beam etching processes with improved cooling efficiency, reducing operator handling risks and costs by allowing larger coolant containers and automatic coolant management, while maintaining precise temperature control for sample preparation.
Implementation Method 1
a cold finger (105) which is thermally connected to the at least one heat-conducting element, the sample table being thermally connected to the cold finger (105) via the at least one heat-conducting element
Implementation Method 2
a channel (115) through which the coolant can flow, which is connected to the coolant container
Implementation Method 3
at least one further heat-conducting element which extends from the cold finger (105) to a mask holder device (103) for a mask (104)
Data Source
Figure 1
Figure 2~3
Figure 4~5
AI summary
The invention relates to a cooling device (101) for a sample in an ion beam etching process, comprising a sample table (102) for arranging the sample, a coolant container (120) containing a coolant, and at least one heat-conducting element (106a, 106b) which thermally connects the sample table (102) to the coolant, wherein the cooling device has a cooling finger (105) which is thermally connected to the heat-conducting element (106a, 106b), wherein the cooling finger (105) has a channel (130, 131) through which the coolant can flow and which can be connected to the coolant container (120).The invention further relates to a method for setting the temperature of a sample in an ion beam etching process, comprising the steps of: (a) fixing a sample on a coolable sample stage (102) of an ion beam etching device, wherein the sample stage (102) is associated with a cooling device according to one of claims 1 to 12, and adjusting the sample on the sample stage (102) and (b) cooling the sample by means of the coolant passed through the channel (131, 132) of the cooling finger, whereby a temperature desired for the ion beam etching process is set.