Ion Beam Apparatus with Mixed Gas Chamber for Hydrogen Stability
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Solution Overview
Problem
Current ion beam apparatuses using gas field ion sources with helium are not reliable or stable when using multiple gas species, particularly with hydrogen, due to safety concerns and operational instability.
Innovation Solution
An ion beam apparatus with a mixed gas chamber containing hydrogen and an inert gas, where the hydrogen concentration is set equal to or lower than the explosive lower limit, and a hydrogen adsorbing material is used to stabilize the hydrogen ion beam, ensuring safety and stability.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If hydrogen gas is used in the gas field ion source to enable diverse gas species observation, then the versatility of the apparatus is improved, but the safety and operational stability deteriorate due to explosion risks
Solution Approach 1:
The patent applies the inert atmosphere principle by introducing nitrogen gas into the ion source chamber to create a safe operating environment. The nitrogen gas serves as a buffer that prevents hydrogen explosion while allowing hydrogen ions to be generated and detected. This enables the apparatus to handle diverse gas species including hydrogen without compromising safety or operational stability.
2Productivity
If hydrogen concentration is increased to improve ion beam intensity, then the productivity is improved, but the safety deteriorates due to approaching explosive limits
Solution Approach 1:
The patent applies the intermediary principle by using nitrogen gas as a mediator between the hydrogen gas and the ion source. The nitrogen gas allows hydrogen ions to be generated and detected while maintaining the hydrogen concentration below explosive limits. This intermediary gas enables high ion beam intensity from hydrogen without the safety risks associated with high hydrogen concentrations.
3Adaptability or versatility
If multiple gas species are supplied to the ion source to enable comprehensive sample analysis, then the adaptability is improved, but the device complexity increases due to gas management requirements
Solution Approach 1:
The patent applies the universality principle by designing the gas supply system to handle multiple gas species through a unified approach. The system uses a single gas supply line that can deliver different gases (hydrogen, helium, nitrogen) and their mixtures to the ion source. This multi-functional gas management system enables comprehensive sample analysis with diverse gas species while avoiding the need for separate complex supply systems for each gas type.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The apparatus achieves stable and safe operation when irradiating samples with hydrogen ions, allowing for high-resolution observations and reduced sample damage, while enabling easy adjustment of ion beam intensity and comparison with other gas species for detailed surface and internal information.
Implementation Method 1
a gas field ion source with an emitter tip; a high voltage of several kV or more is applied to the emitter tip, to thereby field ionize gas molecules, and draw the ionized gas as an ion beam
Implementation Method 2
a hydrogen adsorbing material is used to stabilize the hydrogen ion beam
Data Source
AI summary
In order to provide an ion beam apparatus excellent in safety and stability even when a sample is irradiated with hydrogen ions, the ion beam apparatus includes a vacuum chamber, a gas field ion source that is installed in the vacuum chamber and has an emitter tip, and gas supply means for supplying a gas to the emitter tip. The gas supply means includes a mixed gas chamber that is filled with a hydrogen gas and a gas for diluting the hydrogen gas below an explosive lower limit.