Ion Beam Device Automated Machining Pattern Positioning
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Solution Overview
Problem
Ion beam machining requires high device operation skills due to the need for manual adjustment of machining patterns based on scanning ion microscope images, making it difficult to automate the process and requiring skilled operators for machining samples, probes, or sample tables.
Innovation Solution
The implementation of a system that uses ion beam scanning signals and absorption current detection to automatically determine the shape of the machining target, position the machining pattern, and control ion beam irradiation, allowing for automated machining without the need for high device operation skills.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If manual adjustment of machining patterns based on SIM images is used, then machining precision can be maintained, but device operation skill requirement increases and automation becomes difficult
Solution Approach 1:
The system automatically acquires SIM images, generates machining patterns, and performs machining operations without requiring operator intervention. The device serves itself by integrating image acquisition, pattern generation, and machining control into an automated sequence, eliminating the need for skilled manual operation while maintaining precision.
Solution Approach 2:
The patent replaces manual mechanical adjustment operations with automated image processing and control systems. SIM images are processed through automated algorithms to generate machining patterns, substituting the mechanical skill-based adjustment process with an automated computational system that maintains precision without requiring operator expertise.
2Ease of operation
If automated machining is implemented, then ease of operation improves, but machining precision may deteriorate without skilled operator judgment
Solution Approach 1:
The system uses SIM images as real-time feedback to automatically adjust and generate machining patterns. The absorption current detection provides continuous feedback about the sample geometry, allowing the automated system to adapt the machining pattern dynamically, ensuring precision is maintained through feedback-driven automation rather than static pre-programming.
Solution Approach 2:
The patent changes the operational parameters from manual skill-based judgment to automated image-based detection. By converting visual information from SIM images into quantitative data through absorption current measurement, the system transforms the machining control parameters into an automated format that maintains precision through objective measurement rather than subjective operator judgment.
3Ease of operation
If operator skill requirement is reduced, then ease of operation improves, but productivity may decrease due to conservative machining approaches
Solution Approach 1:
The system performs preliminary acquisition of SIM images and preliminary generation of machining patterns before the actual machining operation. This preliminary action allows the automated system to plan the entire machining sequence in advance, enabling faster execution without requiring skilled operators to make real-time decisions during machining, thus maintaining productivity while reducing skill requirements.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables efficient and accurate machining of samples, probes, or sample tables with reduced operator skill requirements, improving the speed and precision of the ion beam machining process.
Implementation Method 1
an ion beam optical system (1) for irradiating a machining target (2) with an ion beam (9)
Implementation Method 2
an absorption current detection device (6) for detecting an absorption current of the machining target (2)
Data Source
AI summary
Provided are a device and method capable of machining a machining target such as a sample, a probe, or a sample table without requiring a high degree of device operation skill. First, a shape generation process of determining a shape of a machining target on the basis of an ion beam scanning signal and an absorption current of the machining target is performed. Next, a machining pattern positioning process of positioning a machining pattern over an image of the machining target is performed. Further, an ion beam stopping process of stopping ion beam irradiation is performed from a result of comparison between the image of the machining target and the machining pattern while the machining target is machined through the ion beam irradiation.