Ion-Beam Nanoneedle Probe Alignment for Precise CD-SPM Scanning
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Solution Overview
Problem
Existing methods for fabricating scanning probe microscope (SPM) nanoneedle probes face challenges in accurately adjusting the pointing direction and straightening the nanoneedle attached to the probe tip, leading to limitations in scanning sidewalls with irregularities at the nanoscale, with conventional technologies being costly, time-consuming, and lacking the necessary precision for critical dimension scanning.
Innovation Solution
A method using an ion beam to align and straighten the nanoneedle probe tip by irradiating it parallel to the ion beam, allowing for precise adjustment of the pointing direction and severing the nanoneedle to a predetermined length, utilizing focused ion beams with specific voltage, current, and exposure times to achieve the desired accuracy.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Strength
If conventional methods (coating film or focused ion beam) are used to attach nanoneedle to SPM probe tip, then attaching strength and length adjustment are improved, but pointing direction adjustment and shape control remain unsolved
Solution Approach 1:
The patent applies preliminary action by pre-forming the nanoneedle with a specific curvature radius during the attachment process. The nanoneedle is attached to the SPM probe tip while maintaining a predetermined curvature, which enables subsequent pointing direction adjustment through simple rotation of the nanoneedle around the probe tip axis, solving the pointing direction control problem that remained unsolved in conventional methods
2Ease of operation
If nanomanipulator and medium are used to adjust pointing direction, then pointing direction can be controlled, but process time increases and throughput decreases
Solution Approach 1:
The patent extracts and eliminates the need for complex nanomanipulators and additional media from the fabrication process. By pre-forming the nanoneedle with a predetermined curvature during attachment, the method enables pointing direction control through simple rotational movement, removing the cumbersome manipulation steps that reduced throughput in conventional approaches
Solution Approach 2:
The patent changes the geometric parameter of the nanoneedle by introducing a specific curvature radius (R1) during attachment. This parameter change enables the nanoneedle to be rotated to different pointing directions while maintaining stable attachment, achieving both ease of operation and high throughput without requiring complex manipulation equipment
3Manufacturing precision
If ion beam is used to align and straighten nanoneedle, then pointing direction precision and straightening are improved, but process complexity increases
Solution Approach 1:
The patent merges the alignment and straightening functions into a single ion beam irradiation step. By irradiating the nanoneedle with an ion beam along its longitudinal axis, both alignment to the desired pointing direction and straightening (removal of curvature) are achieved simultaneously, reducing process complexity while maintaining high manufacturing precision
4Ease of manufacture
If conventional SPM probe with straight end is used, then fabrication is simple, but scanning accuracy for sidewall irregularities is limited
Solution Approach 1:
The patent applies preliminary action by pre-forming the nanoneedle with a specific curvature radius during the attachment process. This predetermined curvature enables the nanoneedle to conform to and scan sidewall irregularities at nanoscale, significantly improving scanning accuracy while maintaining fabrication simplicity through a single-step attachment process
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach enables precise adjustment of the nanoneedle's pointing direction and shape, improving scanning accuracy for critical dimensions and sidewall irregularities, enhancing throughput and reducing production costs by achieving the required precision and straightening of nanoneedle probes.
Implementation Method 1
aligning the nanoneedle attached on the tip of the SPM probe with the ion beam in parallel by irradiating the ion beam in a direction toward the tip of the SPM probe on which the nanoneedle is attached
Implementation Method 2
aligning the nanoneedle attached on the tip of the SPM probe with the ion beam in parallel by irradiating the ion beam in a direction toward the tip of the SPM probe on which the nanoneedle is attached, wherein said aligning the nanoneedle includes straightening the nanoneedle attached on the tip of the SPM probe along a direction in which the ion beam is irradiated
Data Source
AI summary
The present disclosure relates to a method for fabricating a scanning probe microscope (SPM) nanoneedle probe using an ion beam, a SPM nanoneedle probe, a method of fabricating a critical dimension scanning probe microscope (CD-SPM) nanoneedle probe using an ion beam, a CD-SPM nanoneedle probe, and uses thereof. A disclosed method can comprise: positioning the probe so that a tip of the probe on which the nanoneedle is attached faces toward a direction in which the ion beam is irradiated; and aligning the nanoneedle attached on the tip of the probe with the ion beam in parallel by irradiating the ion beam toward the tip of the probe on which the nanoneedle is attached.