Ion Beam Sample Thermal Management via Shield and Heat Sink

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Solution Overview

Problem

Ion beam sample preparation techniques face challenges in managing the thermal environment of samples during processing, which can lead to undesirable alterations such as softening or melting, affecting the quality of the sample for microscopic observation.

Innovation Solution

An ion beam sample preparation thermal management apparatus that includes a shield retention stage with datum features for precise positioning, a thermally conductive shield, and a heat sink using nitrogen to control the sample's temperature, ensuring accurate and repeatable thermal management during ion beam milling.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Productivity

If ion beam milling is used to prepare samples for microscopic observation, then surface preparation rate is improved, but sample temperature increases causing softening or melting

Engineering Contradiction:
Improvesurface preparation rateVSAvoidsample temperature
Core Design Contradiction:
ProductivityVSTemperature

Solution Approach 1:

A shield is introduced as an intermediary component between the ion beam and the sample. The shield intercepts the ion beam and directs it away from the sample, thereby controlling the heating process and preventing excessive temperature rise while still allowing sufficient material removal for sample preparation

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The position and orientation of the shield are adjusted as controllable parameters to modify the ion beam-sample interaction. By changing the shield's position, the amount of ion beam energy reaching the sample is controlled, thus regulating the temperature and preparation rate to achieve optimal conditions

Inventive Principle:
Principle #35Parameter changes

2Temperature

If shield position is adjusted to control heating, then sample temperature is managed, but positioning precision is reduced

Engineering Contradiction:
Improvesample temperature controlVSAvoidpositioning precision
Core Design Contradiction:
TemperatureVSMeasurement precision

Solution Approach 1:

Datum features are pre-established on both the shield and the stage before the actual sample preparation process. These features enable precise positioning to be restored after shield adjustments, allowing temperature control operations without permanently compromising positioning accuracy

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The shield is designed to be movable and adjustable during the sample preparation process, allowing dynamic control of the ion beam shielding. The system transitions from a static precise position to a dynamic temperature-controlled state and back to a precise position using datum features for re-establishment

Inventive Principle:
Principle #15Dynamics

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This solution reduces the risk of sample damage, allows for efficient processing and observation, and maintains high-quality sample preparation by effectively managing the thermal environment, thereby enhancing the precision and reliability of microscopic analysis.

Implementation Method 1

a heat sink means in communication with said thermal transfer member and configured to conduct heat away from said thermal transfer member

Methodology Applied
Scientific EffectHeat sink: Heat Sink

Implementation Method 2

a thermally conductive shield, and a heat sink using nitrogen to control the sample's temperature

Methodology Applied
Scientific EffectThermal conduction: Conduction (thermal)

Data Source

PatentEP2558837B1Ion beam sample preparation thermal management apparatus and methods
Publication Date: 2022.05.25 GATAN INC
  • EP2558837B1 patent drawingFigure 1~2
  • EP2558837B1 patent drawingFigure 3A~4
  • EP2558837B1 patent drawingFigure 5A~6

AI summary

Disclosed are embodiments of an ion beam sample preparation thermal management apparatus and methods for using the embodiments. The apparatus comprises an ion beam irradiating means in a vacuum chamber that may direct ions toward a sample, a shield blocking a portion of the ions directed toward the sample, and a shield retention stage with shield retention means that replaceably and removably holds the shield in a position. The complementary datum features on both shield and shield retention stage enable accurate and repeatable positioning of the sample in the apparatus for sample processing and reprocessing. A heat sink means is configured to conduct heat away from the sample undergoing sample preparation in the ion beam. The ion beam irradiating means may modulate ion beam intensity between at least two intensities. The shield retention stage may be stationary or rotating.