Ion Beam Specimen Machining With Image-Based Width Termination
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Solution Overview
Problem
Existing specimen machining devices struggle to accurately measure and determine the timing for terminating ion beam milling to achieve a desired machined width, especially in two-stage milling methods for preparing specimens for transmission electron microscopy.
Innovation Solution
A specimen machining device and method that utilizes an ion source, shielding member, camera, and processing unit for acquiring and analyzing images illuminated by coaxial and transmission illumination to measure the machined width and terminate milling when it reaches a target width.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If conventional illumination and photography methods are used to monitor machining width, then the device complexity is reduced, but the measurement precision of machined width deteriorates due to inaccurate determination of machining termination timing
Solution Approach 1:
The coaxial illumination device is configured in advance to illuminate the specimen from the same direction as the camera's optical axis, ensuring that the machined width can be accurately measured from the captured image without requiring additional illumination adjustments or complex imaging setups during the machining process
Solution Approach 2:
The system continuously captures images of the specimen during ion beam machining, measures the machined width from each image, and uses this measurement feedback to determine when to terminate the machining process, thereby achieving precise control of the machined width to within 10 micrometers
2Manufacturing precision
If the machining is terminated based on conventional monitoring methods, then the productivity is maintained, but the manufacturing precision of the specimen thickness deteriorates
Solution Approach 1:
The system replaces conventional mechanical or manual monitoring methods with an automated optical measurement system that uses a camera to capture images and a processing unit to calculate the machined width, enabling precise and rapid determination of machining termination timing without manual intervention
Solution Approach 2:
The system performs self-monitoring and self-control by automatically capturing images, calculating the machined width from the images, and determining the termination timing without external intervention, thereby maintaining high productivity while achieving precise specimen thickness control
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables accurate measurement of machined width and precise determination of milling completion, ensuring specimens are prepared to the correct thickness for electron microscopy observation.
Implementation Method 1
a ion source for irradiating the specimen with the ion beam
Implementation Method 2
ion milling the part not shielded by the shield belt
Implementation Method 3
a coaxial illumination device for irradiating the specimen with illumination light along an optical axis of the camera
Data Source
AI summary
A specimen machining device for machining a specimen by irradiating the specimen with an ion beam includes an ion source for irradiating the specimen with the ion beam, a shielding member disposed on the specimen to block the ion beam, a specimen stage for holding the specimen, a camera for photographing the specimen, a coaxial illumination device for irradiating the specimen with illumination light along an optical axis of the camera, and a processing unit for determining whether to terminate the machining based on an image photographed by the camera. The processing unit performs processing for acquiring information indicating a target machined width, processing for acquiring the image, processing for measuring a machined width on the acquired image, and processing for terminating the machining when the measured machined width equals or exceeds the target machined width.