Ion-Conductive BAW Resonator Tuning With Low Insertion Loss

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Solution Overview

Problem

Current BAW filters with variable frequency ranges often increase device size, cost, power consumption, and insertion losses, while sacrificing linearity behavior.

Innovation Solution

A tunable BAW resonator with an ion-conductible structure, comprising a reflection region with a reflection layer and an ion conductor between terminal layers, allows for mass-loading shifts by transporting ions using an external electric current, enabling frequency tuning without compromising linearity, power consumption, or device size.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Adaptability or versatility

If non-linear materials are used to achieve variable frequency ranges in BAW filters, then frequency tunability is improved, but linearity behavior deteriorates

Engineering Contradiction:
Improvefrequency tunabilityVSAvoidlinearity behavior
Core Design Contradiction:
Adaptability or versatilityVSStability of the object's composition

Solution Approach 1:

The patent changes the physical state and distribution of ions within the BAW resonator structure to achieve frequency tuning. By controlling ion concentration and position through electrical fields, the resonant frequency is adjusted without changing the fundamental linear piezoelectric properties of the materials, thus maintaining linearity while achieving tunability.

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The patent replaces traditional mechanical tuning methods (such as moving parts or non-linear material deformation) with an electrical field-based ion control mechanism. This substitution allows frequency adjustment through electrical control of ion positions, preserving the mechanical integrity and linear behavior of the piezoelectric structure.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

2Adaptability or versatility

If traditional tuning mechanisms are added to BAW filters, then frequency range variability is improved, but device size increases

Engineering Contradiction:
Improvefrequency range variabilityVSAvoiddevice size
Core Design Contradiction:
Adaptability or versatilityVSVolume of moving object

Solution Approach 1:

The patent merges the tuning function directly into the existing BAW resonator structure by incorporating ion-conductive layers and control electrodes within the resonator itself. This integration eliminates the need for separate external tuning mechanisms, achieving frequency variability without increasing device size.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The patent makes the BAW resonator structure multi-functional by enabling it to perform both its primary filtering function and frequency tuning function through the same physical structure. The ion-conductive layers serve dual purposes: maintaining structural integrity and enabling electrical control of resonant frequency.

Inventive Principle:
Principle #6Universality (Multi-functionality)

3Adaptability or versatility

If traditional tuning mechanisms are added to BAW filters, then frequency range variability is improved, but device cost increases

Engineering Contradiction:
Improvefrequency range variabilityVSAvoiddevice cost
Core Design Contradiction:
Adaptability or versatilityVSEase of manufacture

Solution Approach 1:

The patent achieves frequency variability through controllable parameter changes (ion concentration and position) rather than requiring multiple discrete physical components. This approach simplifies manufacturing by using standard semiconductor fabrication techniques to create ion-conductive layers and control electrodes, reducing overall device cost.

Inventive Principle:
Principle #35Parameter changes

4Adaptability or versatility

If traditional tuning mechanisms are added to BAW filters, then frequency range variability is improved, but power consumption increases

Engineering Contradiction:
Improvefrequency range variabilityVSAvoidpower consumption
Core Design Contradiction:
Adaptability or versatilityVSUse of energy by moving object

Solution Approach 1:

The patent uses periodic or pulsed electrical fields to control ion positions for frequency tuning, rather than requiring continuous power application. This allows the resonator to be tuned to different frequencies and then maintain those frequencies with minimal or no power consumption, reducing overall power requirements.

Inventive Principle:
Principle #19Periodic action

5Adaptability or versatility

If traditional tuning mechanisms are added to BAW filters, then frequency range variability is improved, but insertion losses increase

Engineering Contradiction:
Improvefrequency range variabilityVSAvoidinsertion losses
Core Design Contradiction:
Adaptability or versatilityVSLoss of energy

Solution Approach 1:

The patent replaces mechanical tuning mechanisms with electrical field control of ions, eliminating the need for moving parts or physical adjustments that would introduce mechanical losses. This electrical control method maintains low insertion losses while achieving frequency variability.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The tunable BAW resonator achieves adjustable resonance frequencies with reduced power consumption and minimal impact on device size and cost, maintaining low insertion losses and linearity.

Implementation Method 1

The ion conductor is eligible to transport ions between the first terminal layer and the second terminal layer, so as to achieve mass-loading shift between the first terminal layer and the second terminal layer

Methodology Applied
Scientific EffectIon transport: Ion Exchange

Implementation Method 2

a piezoelectric layer sandwiched between the top electrode and the bottom electrode

Methodology Applied
Scientific EffectPiezoelectric effect: Piezoelectric Effect

Data Source

PatentUS11146235B1Tunable BAW resonator with ion-conductible structure
Publication Date: 2021.10.12 QORVO US INC
  • US11146235B1 patent drawing
  • US11146235B1 patent drawing
  • US11146235B1 patent drawing

AI summary

The present disclosure relates to a tunable Bulk Acoustic Wave (BAW) resonator with a top electrode, a bottom electrode, a piezoelectric layer sandwiched between the top electrode and the bottom electrode, and a reflection region underneath the bottom electrode. The reflection region includes a reflection layer and an ion-conductible structure between the bottom electrode and the reflection layer. Herein, the ion-conductible structure has a first terminal layer coupled to the bottom electrode, a second terminal layer coupled to the reflection layer, and an ion conductor between the first terminal layer and the second terminal layer. The ion conductor is eligible to transport ions between the first terminal layer and the second terminal layer, so as to achieve a mass-loading shift between the first terminal layer and the second terminal layer, and consequently, to tune a resonance frequency of the tunable BAW resonator.