Ion-Conductive BAW Resonator Tuning With Low Insertion Loss
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Solution Overview
Problem
Current BAW filters with variable frequency ranges often increase device size, cost, power consumption, and insertion losses, while sacrificing linearity behavior.
Innovation Solution
A tunable BAW resonator with an ion-conductible structure, comprising a reflection region with a reflection layer and an ion conductor between terminal layers, allows for mass-loading shifts by transporting ions using an external electric current, enabling frequency tuning without compromising linearity, power consumption, or device size.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If non-linear materials are used to achieve variable frequency ranges in BAW filters, then frequency tunability is improved, but linearity behavior deteriorates
Solution Approach 1:
The patent changes the physical state and distribution of ions within the BAW resonator structure to achieve frequency tuning. By controlling ion concentration and position through electrical fields, the resonant frequency is adjusted without changing the fundamental linear piezoelectric properties of the materials, thus maintaining linearity while achieving tunability.
Solution Approach 2:
The patent replaces traditional mechanical tuning methods (such as moving parts or non-linear material deformation) with an electrical field-based ion control mechanism. This substitution allows frequency adjustment through electrical control of ion positions, preserving the mechanical integrity and linear behavior of the piezoelectric structure.
2Adaptability or versatility
If traditional tuning mechanisms are added to BAW filters, then frequency range variability is improved, but device size increases
Solution Approach 1:
The patent merges the tuning function directly into the existing BAW resonator structure by incorporating ion-conductive layers and control electrodes within the resonator itself. This integration eliminates the need for separate external tuning mechanisms, achieving frequency variability without increasing device size.
Solution Approach 2:
The patent makes the BAW resonator structure multi-functional by enabling it to perform both its primary filtering function and frequency tuning function through the same physical structure. The ion-conductive layers serve dual purposes: maintaining structural integrity and enabling electrical control of resonant frequency.
3Adaptability or versatility
If traditional tuning mechanisms are added to BAW filters, then frequency range variability is improved, but device cost increases
Solution Approach 1:
The patent achieves frequency variability through controllable parameter changes (ion concentration and position) rather than requiring multiple discrete physical components. This approach simplifies manufacturing by using standard semiconductor fabrication techniques to create ion-conductive layers and control electrodes, reducing overall device cost.
4Adaptability or versatility
If traditional tuning mechanisms are added to BAW filters, then frequency range variability is improved, but power consumption increases
Solution Approach 1:
The patent uses periodic or pulsed electrical fields to control ion positions for frequency tuning, rather than requiring continuous power application. This allows the resonator to be tuned to different frequencies and then maintain those frequencies with minimal or no power consumption, reducing overall power requirements.
5Adaptability or versatility
If traditional tuning mechanisms are added to BAW filters, then frequency range variability is improved, but insertion losses increase
Solution Approach 1:
The patent replaces mechanical tuning mechanisms with electrical field control of ions, eliminating the need for moving parts or physical adjustments that would introduce mechanical losses. This electrical control method maintains low insertion losses while achieving frequency variability.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The tunable BAW resonator achieves adjustable resonance frequencies with reduced power consumption and minimal impact on device size and cost, maintaining low insertion losses and linearity.
Implementation Method 1
The ion conductor is eligible to transport ions between the first terminal layer and the second terminal layer, so as to achieve mass-loading shift between the first terminal layer and the second terminal layer
Implementation Method 2
a piezoelectric layer sandwiched between the top electrode and the bottom electrode
Data Source
AI summary
The present disclosure relates to a tunable Bulk Acoustic Wave (BAW) resonator with a top electrode, a bottom electrode, a piezoelectric layer sandwiched between the top electrode and the bottom electrode, and a reflection region underneath the bottom electrode. The reflection region includes a reflection layer and an ion-conductible structure between the bottom electrode and the reflection layer. Herein, the ion-conductible structure has a first terminal layer coupled to the bottom electrode, a second terminal layer coupled to the reflection layer, and an ion conductor between the first terminal layer and the second terminal layer. The ion conductor is eligible to transport ions between the first terminal layer and the second terminal layer, so as to achieve a mass-loading shift between the first terminal layer and the second terminal layer, and consequently, to tune a resonance frequency of the tunable BAW resonator.


