Ion Current Gas Detector Shielding for Faster Stable Sensing

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Solution Overview

Problem

In fast vacuum applications, previous current amplifiers in the lower current range are the slowest link in the signal chain, and conventional measuring resistors used to measure ion current suffer from high parasitic stray capacitances and reduced stability when amplifying ion current, especially with electron multipliers.

Innovation Solution

The implementation of an electrical shield resistor surrounding the measuring resistor, with both resistors having opposing ends connected to the same potential, and the shield resistor having a lower resistance value than the measuring resistor, effectively eliminating parasitic stray capacitances by maintaining a comparable voltage drop across both resistors.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If high-ohm measuring resistors (around 500 gigaohms) are used to measure ion current, then noise component in the measuring signal is kept low, but parasitic stray capacitances are produced which slow down the response time

Engineering Contradiction:
Improvenoise level in measuring signalVSAvoidresponse time
Core Design Contradiction:
Measurement precisionVSSpeed

Solution Approach 1:

The patent applies equipotentiality by surrounding the measuring resistor with a shield resistor and applying the same potentials to mutually opposed regions of both resistors. This creates a comparable voltage drop across both resistors, eliminating current flow through parasitic capacitances and thereby reducing their harmful effect on response time while maintaining the high resistance needed for low noise measurement

Inventive Principle:
Principle #12Equipotentiality

2Power

If conventional current amplifiers are used in the lower current range, then ion current can be amplified, but they are the slowest link in the signal chain

Engineering Contradiction:
Improvecurrent amplification capabilityVSAvoidsignal chain response speed
Core Design Contradiction:
PowerVSSpeed

Solution Approach 1:

The patent changes the electrical parameters of the measuring system by introducing a shield resistor with lower resistance value than the measuring resistor. This parameter change creates a different voltage distribution that reduces the time constant of the system, thereby speeding up the response of the current amplifier without sacrificing its amplification capability

Inventive Principle:
Principle #35Parameter changes

3Speed

If electron multipliers are used to amplify ion current, then response time is reduced, but stability decreases

Engineering Contradiction:
Improveresponse timeVSAvoidmeasurement stability
Core Design Contradiction:
SpeedVSReliability

Solution Approach 1:

The shield resistor acts as an intermediary element between the measuring resistor and the surrounding environment. It mediates the electrical field distribution around the measuring resistor, creating a stable potential environment that reduces parasitic capacitance effects. This allows the system to achieve fast response times without the instability associated with electron multipliers

Inventive Principle:
Principle #24Intermediary (Mediator)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration enhances the response time and stability of the gas detector by reducing parasitic capacitances and noise in the signal, allowing for more efficient measurement of ion currents without the drawbacks of conventional high-ohm resistors.

Implementation Method 1

an ionizing device (12) for producing ions depending on a gas type (20) to be detected and for producing an ion current depending on the ions

Methodology Applied
Scientific EffectIonization: Ionisation

Implementation Method 2

A measurable electrical measuring potential is produced from the amplified current by means of an electrical measuring resistor (16)

Methodology Applied
Scientific EffectElectrical resistance: Electrical Resistance

Implementation Method 3

the measuring resistor (16) is surrounded at least in part by an electrical shield resistor (RT) and the same potentials up to a deviation of at most 25% are applied in the longitudinal direction of the measuring resistor (16) to mutually opposed regions of the measuring resistor (16) and the shield resistor (RT)

Methodology Applied
Scientific EffectElectrical shielding: Electric Field

Data Source

PatentUS11754525B2Gas detector with an ionizing device
Publication Date: 2023.09.12 INFICON GMBH
  • US11754525B2 patent drawing
  • US11754525B2 patent drawing
  • US11754525B2 patent drawing

AI summary

The disclosure provides a gas detector with an ionizing device for producing ions depending on a gas to be detected. The gas detector includes a catcher for receiving the electrical current produced by the ions, and a measuring device with an electrical measuring resistor. The electrical measuring resistor produces an electrical measuring potential from the current and is surrounded, at least in part, by an electrical shield resistor, denoted by RT. The same potentials, up to a deviation of at most 25%, are applied in the longitudinal direction of the electrical measuring resistor to mutually opposed regions of the electrical measuring resistor and the electrical shield resistor.