Microstructured Energy Filter Membrane for Thermal Stress Relief
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Solution Overview
Problem
Existing ion implantation devices face issues with localized heating and thermal stress in energy filters due to ion beam absorption, leading to mechanical deformation and damage, which can result in defective wafers and non-uniform depth profiles.
Innovation Solution
The ion implantation device incorporates an energy filter with an additional thermal energy dissipation surface area, featuring microstructures on the membrane surfaces and a cooling mechanism with fluid conduits and absorber elements to manage thermal stress and enhance cooling efficiency.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Use of energy by moving object
If the energy filter membrane is made thin to reduce ion beam energy loss, then the ion beam energy is preserved, but the membrane becomes susceptible to thermal stress and mechanical deformation
Solution Approach 1:
The patent extends the thin membrane structure into the third dimension by adding protrusions that protrude from one surface of the membrane. This creates additional surface area for heat dissipation without increasing the in-plane dimensions of the membrane, allowing the membrane to remain thin for minimal ion beam energy loss while providing enhanced thermal management capability through the protruding structures.
Solution Approach 2:
The patent converts the harmful thermal energy that would otherwise cause stress and deformation into a manageable parameter by providing dedicated heat dissipation pathways through the protrusions. The protrusions act as heat sinks that actively draw thermal energy away from the membrane, transforming the potential damage mechanism into a controlled thermal management system.
2Strength
If the energy filter membrane is made thick to increase structural strength, then mechanical strength is improved, but ion beam energy loss increases
Solution Approach 1:
Instead of increasing the in-plane thickness of the membrane, the patent adds vertical dimension through protrusions that extend from the membrane surface. This provides additional structural support and heat dissipation capacity without increasing the path length that ion beams must traverse through the membrane material, thereby maintaining low energy loss while enhancing strength.
3Reliability
If cooling mechanisms are added to the energy filter, then thermal stress is reduced, but device complexity increases
Solution Approach 1:
The patent merges the structural support function and thermal management function into a single integrated component - the protrusions are part of the membrane structure itself rather than separate cooling attachments. This consolidation provides cooling capability while minimizing additional complexity by using the same material and manufacturing process as the membrane.
Solution Approach 2:
The protrusions serve dual functions: they provide structural reinforcement to the membrane while simultaneously acting as heat dissipation elements. The membrane structure essentially cools itself through its own geometric features rather than requiring entirely separate cooling systems.
4Temperature
If the membrane surface area is increased to improve heat dissipation, then thermal management is enhanced, but the ion beam path area increases leading to more energy absorption
Solution Approach 1:
The patent resolves this contradiction by adding surface area in the vertical dimension through protrusions rather than expanding the in-plane membrane area. The protrusions provide additional heat dissipation surface that does not intercept the ion beam path, allowing thermal management improvement without increasing ion beam energy loss.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This design effectively reduces thermal stress and maintains temperature homogeneity, preventing mechanical deformation and enabling more precise and efficient ion implantation processes.
Implementation Method 1
the first surface being a structured surface... the energy filter has an additional thermal energy dissipation surface area
Implementation Method 2
a cooling mechanism with fluid conduits and absorber elements to manage thermal stress and enhance cooling efficiency
Implementation Method 3
Existing ion implantation devices face issues with localized heating and thermal stress in energy filters due to ion beam absorption
Data Source
AI summary
An ion implantation device is provided, comprising an energy filter, wherein the energy filter has a thermal energy dissipation surface area, wherein the energy filter comprises a membrane with a first surface and a second surface disposed opposite to the first surface, the first surface being a structured surface, wherein the first structured surface or the second surface has a microstructure imposed thereon and forms an additional thermal energy dissipation surface area, wherein the spatial dimensions of the microstructure are between 3-5% of the spatial dimensions of a structure on the first structured surface.