Ion Implantation for Vanadium Oxide Phase-Transition Temperature Control

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Solution Overview

Problem

The existing methods for adjusting the phase-transition temperature of vanadium oxide materials are complex, offer a limited temperature adjustment range, and cannot achieve continuous or regional adjustments, hindering their application in smart windows, photoelectric switches, and infrared detection.

Innovation Solution

A method involving the implantation of gaseous ions, such as O, N, H, He, Ne, or Ar, into a vanadium oxide base material to alter its phase-transition temperature, allowing for continuous adjustment and regional control by changing the implantation dosage and using a mask for localized implantation.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Temperature

If metal ions are doped into vanadium dioxide to decrease phase-transition temperature, then the phase-transition temperature can be significantly decreased, but the process becomes complex and the temperature adjustment range is limited

Engineering Contradiction:
Improvephase-transition temperatureVSAvoidprocess complexity
Core Design Contradiction:
TemperatureVSDevice complexity

Solution Approach 1:

The patent applies parameter changes by controlling the implantation dosage of gaseous ions (such as tungsten ions) into vanadium dioxide. By varying the ion implantation dosage parameter, the phase-transition temperature can be continuously adjusted from room temperature down to cryogenic temperatures. This resolves the contradiction by providing a simple, controllable parameter (ion dosage) that directly determines the phase-transition temperature without complex multi-step processes.

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The patent replaces the chemical doping method with a physical ion implantation method. Instead of chemically incorporating metal ions during material synthesis, gaseous ions are physically implanted into the vanadium dioxide lattice. This substitution simplifies the process by decoupling the temperature adjustment from complex chemical synthesis procedures, allowing independent control of phase-transition temperature through ion dosage control.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

2Adaptability or versatility

If metal ions are doped into vanadium dioxide to adjust phase-transition temperature, then temperature adjustment is possible, but continuous adjustment and regional adjustment cannot be achieved

Engineering Contradiction:
Improvetemperature adjustment flexibilityVSAvoidadjustment capability
Core Design Contradiction:
Adaptability or versatilityVSDevice complexity

Solution Approach 1:

The patent introduces dynamics by enabling continuous adjustment of the phase-transition temperature through variable ion implantation dosages. Unlike fixed chemical doping, the ion implantation process allows dynamic control where the phase-transition temperature can be tuned continuously across a wide range by simply changing the implantation dosage parameter. This provides adaptability for different application requirements without requiring different material compositions.

Inventive Principle:
Principle #15Dynamics

Solution Approach 2:

The patent applies local quality by enabling regional ion implantation through mask techniques. Different regions of the vanadium dioxide material can receive different ion dosages, creating spatially varying phase-transition temperatures within the same material. This allows local optimization for specific application zones, such as creating gradient structures or region-specific functional zones, thereby achieving both continuous and regional adjustment capabilities.

Inventive Principle:
Principle #3Local quality

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach simplifies the process, enables continuous and precise adjustment of phase-transition temperatures, enhances flexibility, and combines with other methods for a broader adjustment range, making the material suitable for various applications by modifying the stress and strain conditions within the vanadium oxide without affecting its valence states.

Implementation Method 1

implanting gaseous ions into the vanadium oxide base material, to obtain a phase-transition type vanadium oxide material having a preset phase-transition temperature

Methodology Applied
Scientific EffectIon implantation: Ion Implantation

Data Source

PatentUS10858728B2Phase-change type vanadium oxide material and preparation method therefor
Publication Date: 2020.12.08 SHANGHAI INST OF MICROSYSTEM & INFORMATION TECH CHINESE ACAD OF SCI
  • US10858728B2 patent drawing
  • US10858728B2 patent drawing

AI summary

A phase-transition type vanadium oxide material and a preparation method therefor. The preparation method includes the following steps: providing a vanadium oxide base material, and implanting gaseous ions into the vanadium oxide base material, to obtain a phase-transition type vanadium oxide material having a preset phase-transition temperature. Subsequently, optionally, further annealing may be performed to adjust a bubble generation status in vanadium oxide after the gaseous ions are implanted, to further adjust the stress and strain and the phase-transition temperature. The method for preparing a phase-transition type vanadium oxide material consistent with the present invention has simple steps, desirable process reproducibility, high flexibility, and the phase-transition temperature of vanadium oxide can be continuously adjusted by changing an implantation dosage of the gaseous ions. In addition, the present invention has desirable compatibility, and can be combined with other phase-transition temperature methods, to achieve a larger phase-transition temperature adjustment range.