Ion Implanter Terminal Structure High Voltage Insulation
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Solution Overview
Problem
Conventional ion implanters are limited in terminal voltage due to the size of the grounded enclosure, restricting the electric field modification and preventing the energization of the terminal structure to high voltages within a reasonably sized footprint.
Innovation Solution
Incorporating an insulated conductor with a dielectric strength greater than 75 kV/inch proximate to the terminal structure to modify the electric field, allowing for higher voltage energization while reducing electric stress in the air gap and promoting a more uniform electric field.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If air is used to insulate the terminal structure from the grounded enclosure, then the terminal voltage is limited to about 200 kV, but the enclosure size can be kept reasonably small
Solution Approach 1:
An insulated conductor with dielectric strength greater than 75 kV/inch is introduced as an intermediary component between the terminal structure and the grounded enclosure. This insulated conductor modifies the electric field distribution, allowing the terminal structure to be energized to high voltages (at least 600 kV) while maintaining a reasonably sized enclosure footprint, thereby resolving the contradiction between high voltage capability and compact size
Solution Approach 2:
The patent changes the dielectric parameter by using an insulated conductor with dielectric strength greater than 75 kV/inch, which is significantly higher than air's dielectric strength. This parameter change enables the system to achieve higher terminal voltages (at least 600 kV) without proportionally increasing the air gap distance, thus maintaining a compact enclosure while improving voltage capability
2Volume of stationary object
If the air gap between the terminal structure and grounded enclosure is reduced, then the enclosure size is minimized, but the terminal voltage capability is limited
Solution Approach 1:
The insulated conductor serves as a mediator that allows the system to maintain a reduced air gap (compact enclosure footprint) while compensating for the reduced insulation distance through its high dielectric strength material, enabling both compact size and high voltage capability to coexist
Solution Approach 2:
The system uses a composite insulation approach combining air (in the reduced air gap) with an insulated conductor featuring high dielectric strength material. This composite material strategy allows the system to achieve the required voltage insulation capability in a compact enclosure by leveraging the superior dielectric properties of the insulated conductor material
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables the terminal structure to be energized to higher voltage levels, such as at least 600 kV, within the same enclosure size, while ensuring safe insulation and reducing the air gap requirements, thus overcoming the limitations of conventional ion implanters.
Implementation Method 1
The insulated conductor has an insulator with a dielectric strength greater than 75 kilovolts (kV)/inch disposed about a conductor
Data Source
AI summary
An apparatus includes a conductive structure and an insulated conductor disposed proximate an exterior portion of the conductive structure to modify an electric field about the conductive structure. The insulated conductor has an insulator with a dielectric strength greater than 75 kilovolts (kV)/inch disposed about a conductor. An ion implanter is also provided. The ion implanter includes an ion source configured to provide an ion beam, a terminal structure defining a cavity, the ion source at least partially disposed within the cavity, and an insulated conductor. The insulated conductor is disposed proximate an exterior portion of the terminal structure to modify an electric field about the terminal structure. The insulated conductor has an insulator with a dielectric strength greater than 75 kV/inch disposed about a conductor.