Ion Implanter Transfer Chamber X-Ray Interlock Shielding
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Solution Overview
Problem
Existing ion implanters face safety challenges due to the potential leakage of X-rays during substrate handling and maintenance operations, which can expose operators to radiation risks.
Innovation Solution
The ion implanter incorporates a transfer chamber with shielding walls and doors equipped with sensors and a controller to detect open states, ensuring X-ray irradiation is stopped or disabled when operators access the chamber, thereby preventing X-ray leakage.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Object-affected harmful factors
If the transfer chamber is equipped with shielding walls and door sensors to prevent X-ray leakage, then operator safety is improved, but device complexity increases
Solution Approach 1:
Door sensors are introduced as intermediary detection devices that monitor the state of shielding doors and communicate with the controller. This intermediary system enables automatic safety control without requiring complex manual intervention systems, resolving the contradiction by providing automated protection while maintaining manageable system complexity.
Solution Approach 2:
The system implements feedback control where door sensors continuously monitor shielding door states and provide real-time information to the controller. When a door is detected as open, the controller automatically stops or disables X-ray irradiation. This feedback mechanism ensures operator safety through automated response, eliminating the need for complex manual safety protocols.
2Object-affected harmful factors
If the controller stops or disables X-ray irradiation when a door is open, then operator safety is improved, but productivity decreases due to interruptions
Solution Approach 1:
The system employs periodic action by resuming X-ray irradiation automatically after the door is closed and the system returns to a safe state. This allows processing to continue in periodic cycles (stop when door opens, resume when door closes) rather than halting permanently, thereby maintaining productivity while ensuring safety during door operations.
3Object-affected harmful factors
If shielding doors are installed in the transfer chamber, then X-ray leakage is prevented, but ease of operation deteriorates due to access restrictions
Solution Approach 1:
The shielding doors are designed as dynamic components that can open and close based on operational requirements. The system allows door opening for substrate loading/unloading and maintenance access, with the controller automatically managing X-ray irradiation state. This dynamic design provides both radiation protection when closed and operational accessibility when open, resolving the contradiction between shielding effectiveness and ease of operation.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Ensures safe operation by preventing X-ray exposure during substrate handling and maintenance, enhancing safety for operators and maintaining the integrity of the X-ray irradiation process.
Implementation Method 1
an X-ray irradiator disposed in the transfer chamber and configured to irradiate the substrate with X-rays before ion implantation
Implementation Method 2
The plurality of shielding walls and the at least one shielding door are configured to shield the X-rays irradiated by the X-ray irradiator
Data Source
AI summary
An ion implanter for implanting ions into a substrate includes a transfer chamber that receives the substrate from and delivers the substrate to an outside of the ion implanter, an X-ray irradiator disposed in the transfer chamber that irradiates the substrate with X-rays before ion implantation, and a controller that stops X-ray irradiation by the X-ray irradiator or disables activation of the X-ray irradiator in response to a predetermined situation being detected in the transfer chamber or outside the transfer chamber.