Scanning Ion Microscope Thin Film Neutralizer for Insulator Imaging
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Solution Overview
Problem
Scanning ion microscopes face challenges in observing insulator specimens due to image distortion caused by partial electrification, which existing neutralization methods fail to completely address, especially when converging ion beams and removing charged particles.
Innovation Solution
A scanning ion microscope using a gas field ionization ion source with a thin film supported by an electrically-conductive member, where ions are neutralized and secondary electrons are controlled to prevent distortion, allowing for precise observation of insulator specimens.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If ion beam is used to scan insulator specimen, then high resolution imaging is achieved, but image distortion occurs due to partial electrification of the specimen
Solution Approach 1:
A thin film is introduced as an intermediary layer between the ion beam and the insulator specimen. This thin film neutralizes the ion beam charges through charge exchange, converting ions into neutral atoms before they reach the specimen surface, thereby preventing electrification-induced image distortion while preserving the high resolution capability of ion beam scanning
Solution Approach 2:
The invention changes the physical state parameter of the ion beam by neutralizing its charge. By controlling the charge state of the incident particles (from charged ions to neutral atoms), the harmful electrification effect on the insulator specimen is eliminated while maintaining the beam's spatial resolution characteristics
2Reliability
If thin film is introduced to neutralize ion beam, then secondary electrons are generated, but background noise increases
Solution Approach 1:
The invention applies local quality control by using an electrically-conductive support member with spatially selective electric potential control. Different regions of the support member can be assigned different electric potentials to selectively attract or repel secondary electrons from specific areas, thereby controlling where secondary electrons are generated and directed
Solution Approach 2:
The invention implements feedback control through means for controlling the electric potential of the support member. By monitoring secondary electron generation and adjusting the support member's electric potential accordingly, the system dynamically optimizes secondary electron control to minimize background noise while maintaining effective ion beam neutralization
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables precise and undistorted imaging of insulator specimens by neutralizing the ion beam and controlling secondary electrons, improving the convergence characteristics and reducing background noise.
Implementation Method 1
most of the ions applied to the thin film are neutralized after going through a first layer on the surface of the thin film, and are emitted as uncharged particles when transmitting through the thin film
Implementation Method 2
focused ion beam (FIB) devices that have gas field ionization ion source (GFIS) and use gas ions such as hydrogen (H2), helium (He), and neon (Ne)
Data Source
AI summary
The present invention is provided to enable a detailed inspection of a specimen and preventing a distortion of an observation image even when a specimen containing an insulating material is partially charged. For a scanning ion microscope utilizing a gas field ionization ion source, a thin film is disposed between an ion optical system and a specimen, and an ion beam is applied to and transmitted through this thin film in order to focus a neutralized beam on the specimen. Furthermore, an electrode for regulating secondary electrons discharged from this thin film is provided in order to eliminate mixing of noises into an observation image.