Ion Milling Blocking Plate for Thermal Damage Suppression
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Solution Overview
Problem
Ion milling apparatuses using low acceleration voltage to mitigate thermal damage to heat-sensitive samples, such as resin or rubber, face challenges in preventing temperature rises due to the enlarged irradiation area of the ion beam, leading to sample deformation despite cooling efforts.
Innovation Solution
Incorporating a slit-including blocking plate between the sample mask and ion source to limit the ion beam irradiation area, reducing the exposure of the sample to the ion beam and enhancing heat transfer through improved thermal conductivity materials.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Object-affected harmful factors
If ion beam irradiation is performed at low acceleration voltage to mitigate thermal damage, then thermal damage to the sample is reduced, but the irradiation area is enlarged causing temperature rise and sample deformation
Solution Approach 1:
The blocking plate is divided into a main body portion and a protruding portion that extends toward the ion source. This segmentation allows the protruding portion to specifically limit the irradiation area without affecting the overall blocking function, thereby reducing the irradiated area while maintaining low acceleration voltage benefits
Solution Approach 2:
The protruding portion of the blocking plate acts as an intermediary element between the ion source and the sample. It selectively blocks portions of the ion beam before they reach the sample, creating a restricted irradiation pattern that reduces both the area and total energy deposited on the sample
2Temperature
If cooling source is connected to blocking plate and sample stage to cool heat-sensitive samples, then some thermal protection is provided, but cooling effect is insufficient compared to heat generation from ion beam
Solution Approach 1:
The protruding portion of the blocking plate performs preliminary action by blocking excess ion beams before they reach the sample. This pre-blocking reduces the total calorific value generated at the sample, making the subsequent cooling effect more effective in maintaining sample temperature
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Effectively suppresses thermal damage to the sample by reducing the irradiated area and improving heat transfer, preventing sample deformation during ion beam processing at low acceleration voltages.
Implementation Method 1
irradiates the sample with an argon ion beam applied with a voltage of approximately 10 kV or less without focusing, sputters atoms from a sample surface utilizing physical sputtering phenomenon
Implementation Method 2
a blocking plate (mask) and a sample stage are connected to a cooling source and the sample is thereby cooled
Implementation Method 3
an ion beam of an ion milling apparatus has an acceleration voltage of approximately 10 kV and an ion beam current of approximately 200 μA and thus a calorific value generated by ion beam irradiation is approximately 2 J/s
Data Source
AI summary
Provided is a technology for suppressing a heat rise in a sample, the heat rise being generated due to ion beam irradiation at a low acceleration voltage. A blocking plate, which is different from a mask, is disposed in front of a sample. The blocking plate has an opening that overlaps a processing surface, and ion beams pass only through the opening of the blocking plate, and in the areas excluding the opening, the ion beams are blocked by the blocking plate, and the sample is not irradiated thereby. Furthermore, the heat rise in the sample is further suppressed by cooling the blocking plate.