Ion Neutralization Reflector Assembly for Low-Contamination Etching

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Solution Overview

Problem

Existing ion neutralization modules in ion beam etching apparatuses face issues such as contaminant generation, thermal deformation, and surface roughness changes at high temperatures, which degrade neutralization efficiency and restrict the use of certain reaction gases.

Innovation Solution

The ion neutralization module incorporates a reflector with a plurality of blades, a frame with a material different from the reflector, and a conductive adhesive that allows electron transportation while preventing refrigerant leakage. This design includes a detachable reflector and frame, enabling the use of optimal materials for semiconductor processes, thus suppressing contaminant generation and thermal issues.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Device complexity

If an integral type reflector is used, then the structure is simple, but contaminants are generated from the reflector due to strong ion beam collision

Engineering Contradiction:

Improvereflector structureVSAvoidcontaminant generation

Core Design Contradiction:

Device complexityVSObject-generated harmful factors

Solution Approach 1:

The reflector is divided into multiple independent blades rather than using an integral type structure. This segmentation allows each blade to be independently optimized and replaced, reducing contaminant generation from ion beam collision while maintaining structural simplicity through modular design.

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

The material parameters of the reflector blades are changed to materials that are more resistant to ion beam bombardment and contaminant generation. By selecting appropriate materials with specific properties, the harmful effects of ion collision are reduced while maintaining the reflector's functional performance.

Inventive Principle:

Principle #35Parameter changes

2Strength

If the reflector is made of metal, then the structural strength is sufficient, but certain reaction gases are restricted due to chemical reactions

Engineering Contradiction:

Improvereflector structural strengthVSAvoidreaction gas compatibility

Core Design Contradiction:

StrengthVSAdaptability or versatility

Solution Approach 1:

The reflector blades are constructed using composite materials that combine the structural strength of metals with the chemical inertness of other materials. This allows the reflector to maintain sufficient mechanical strength while being compatible with a wider range of reaction gases, eliminating the restrictions imposed by pure metal construction.

Inventive Principle:

Principle #40Composite materials

3Reliability

If the reflector operates at high temperature, then the neutralization efficiency is maintained, but thermal deformation and surface roughness changes occur

Engineering Contradiction:

Improveneutralization efficiencyVSAvoidthermal deformation and surface roughness

Core Design Contradiction:

ReliabilityVSStability of the object's composition

Solution Approach 1:

The segmented blade structure allows for independent thermal management of each blade. The gaps between blades facilitate heat dissipation, reducing thermal accumulation and preventing thermal deformation while maintaining the neutralization efficiency through proper material selection and cooling design.

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

A conductive adhesive is introduced as an intermediary between the reflector blades and the frame. This adhesive not only provides mechanical attachment but also serves as a thermal management interface, helping to dissipate heat and prevent thermal deformation of the blades while maintaining electrical conductivity for electron supply.

Inventive Principle:

Principle #24Intermediary (Mediator)

4Adaptability or versatility

If a detachable reflector and frame structure is used, then optimal materials can be selected, but the device complexity increases

Engineering Contradiction:

Improvematerial selection flexibilityVSAvoiddetachable structure

Core Design Contradiction:

Adaptability or versatilityVSDevice complexity

Solution Approach 1:

The detachable structure divides the reflector system into separable components (blades and frame), allowing optimal materials to be selected for each component based on its specific functional requirements. The modular design simplifies the attachment and detachment processes, reducing the operational complexity despite the increased material selection flexibility.

Inventive Principle:

Principle #1Segmentation

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution effectively suppresses contaminant generation, thermal deformation, and surface roughness changes, enhancing the neutralization efficiency of the ion neutralization module and allowing for a wider range of reaction gases to be used.

Implementation Method 1

a conductive adhesive interposed between the reflector and the frame to attach the reflector to the frame, the conductive adhesive configured to allow electron transportation

Methodology Applied

Scientific EffectElectron conduction: Conduction (electrical)

Implementation Method 2

a frame configured to support the reflector, the frame including a material different from a material of the reflector

Methodology Applied

Scientific EffectHeat transfer: Conduction (thermal)

Data Source

PatentUS20250140509A1Ion neutralization module

Publication Date: 2025.05.01 SAMSUNG ELECTRONICS CO LTD

AI summary

An ion neutralization module comprising a reflector configured to neutralize an ion, a frame configured to support the reflector, and a conductive adhesive between the reflector and the frame to attach the reflector to the frame.