Ion Probe Target Holder Assembly Flatness and Field Distortion
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Solution Overview
Problem
The position changes during SIMS sample testing with ion probes affect the reproducibility of analysis results due to electric field distortions caused by the height difference between the sample target and tungsten plates used in traditional target holders.
Innovation Solution
A target holder assembly with limiting portions symmetrically arranged around the sample target hole, replacing tungsten plates, which form recesses on the sample target to ensure a flat surface contact, eliminating electric field distortions and improving reproducibility.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If tungsten plates are used in traditional target holders to support the sample target, then the sample target can be held in place, but the height difference between the sample target and tungsten plates causes electric field distortions that reduce analysis reproducibility
Solution Approach 1:
The patent removes the tungsten plates from the target holder assembly, extracting the harmful element that causes electric field distortion. By eliminating the tungsten plates entirely and replacing them with a flat bottom surface, the source of electric field interference is removed, thereby improving reproducibility without compromising sample target support.
Solution Approach 2:
The patent changes the geometric parameter of the target holder by reducing the height of the support surface from a multi-layer tungsten plate structure to a flat bottom surface. This parameter change eliminates the height difference between the sample target and support structure, preventing electric field distortion while maintaining mechanical support functionality.
2Measurement precision
If the sample target area is limited by the boundary of the target holder, then the target holder can maintain a compact structure, but the analysis point being close to the boundary reduces measurement precision
Solution Approach 1:
The patent extends the usable area of the sample target in the radial dimension by removing the limiting tungsten plates. This allows analysis points to be positioned farther from the boundary, improving measurement precision. The flat bottom surface provides support without constraining the radial extent of the sample target area.
3Manufacturing precision
If limiting portions are added to the target holder to improve sample target positioning, then positioning accuracy improves, but the device complexity increases
Solution Approach 1:
The patent applies a localized flat bottom surface at the specific location where sample target contact is needed, rather than adding complex limiting structures throughout the device. This localized approach provides sufficient positioning accuracy while maintaining overall structural simplicity.
Data Source
AI summary
Disclosed are a target holder assembly of an ion probe and a method for preparing a sample target thereof. Specifically, the target holder assembly includes a body and sheets, a middle part of the body is provided with a sample target hole, and limiting portions are symmetrically arranged at an opening of the sample target hole away from a sample target entry side; and the sheets match the limiting portions in shape and dimension to form recesses on a sample target for receiving the limiting portions.