Ion Processing Apparatus Mechanical Isolation
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Solution Overview
Problem
Ion processing devices with two-dimensional geometry face challenges in maintaining precise control over ion motions due to external forces and fabrication/assembly issues, leading to non-uniform electrical fields and reduced mass resolution.
Innovation Solution
The use of a plurality of main electrodes, insulators, compliant supports, and pins to create a mechanically isolated ion processing apparatus, ensuring precise orientation and parallelism of electrodes, and employing EDM for precise machining and assembly.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If electrodes are precisely machined and assembled to maintain parallelism within ±20 μm, then mass resolution is improved, but device complexity and manufacturing difficulty increase
Solution Approach 1:
The electrode assembly is divided into modular components with standardized interfaces. Each electrode can be independently positioned using the compliant support structure, allowing precise alignment without requiring complex overall assembly procedures. The segmentation enables incremental adjustment and simplifies the assembly process while maintaining the required ±20 μm parallelism tolerance for mass resolution.
Solution Approach 2:
Compliant supports act as intermediary elements between the electrode components and the housing. These supports provide mechanical isolation while maintaining precise electrode positioning through their compliance characteristics. The intermediaries absorb assembly variations and external forces, enabling precise electrode alignment without requiring equally precise assembly fixtures and procedures.
2Stability of the object's composition
If electrodes are rigidly fixed to maintain precise geometry, then field uniformity is improved, but susceptibility to external forces and thermal strains increases
Solution Approach 1:
Compliant supports with flexible characteristics are used to hold the electrodes. These compliant structures provide mechanical isolation from external forces while maintaining the required electrode geometry through their elasticity. The flexibility allows the supports to absorb external disturbances and thermal expansions without transmitting them to the electrodes, thereby protecting the electrode geometry from harmful external forces.
Solution Approach 2:
The compliant supports are designed beforehand to provide cushioning against external forces and thermal strains. By incorporating compliance into the support structure, the system is pre-prepared to absorb mechanical shocks and thermal expansions before they can affect the electrode geometry. This prior cushioning protects the precise electrode alignment from various harmful external factors during operation.
3Stability of the object's composition
If mechanical isolation from external forces is implemented, then field uniformity is improved, but device complexity increases
Solution Approach 1:
The compliant supports serve as flexible mechanical isolation elements between the electrode assembly and the external environment. Rather than implementing complex rigid isolation mechanisms, the patent uses the inherent compliance of the support structures to provide mechanical isolation. This approach achieves field uniformity by isolating electrodes from external forces while adding minimal structural complexity compared to rigid isolation systems.
Data Source
AI summary
An ion processing apparatus includes a plurality of electrodes, first and second insulators, a housing, and a plurality of compliant first supports and second supports. Each electrode has a length along a central axis, and includes a first end region and an axially opposing second end region. The first and second insulators are coaxially disposed about the first and second end regions, respectively. The housing is coaxially disposed about the electrodes, the first insulator and the second insulator. The first supports extend between, and into contact with, the first insulator and the housing. The second supports extend between, and into contact with, the second insulator and the housing. The supports isolate the electrodes from external forces.