Ion Pump Electrode Segmentation for Vacuum Exhaust

Resolve Bottlenecks,
Find Innovative Solutions
Generate Solutions

Solution Overview

Problem

Conventional ion pump systems have a saddle point where no effective magnetic field is present, limiting the effective use of electric and magnetic fields across the getter surface and thus reducing exhaust efficiency.

Innovation Solution

The use of a plurality of disc-shaped electrodes in both the inner and outer casings, with strategically positioned magnets, ensures that electric and magnetic fields are effectively utilized across the entire getter surface, eliminating saddle points and enhancing exhaust efficiency.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Productivity

If a magnet is provided in the inner casing and a magnet is provided in the outer casing (conventional configuration), then the structure is relatively simple, but a saddle point where no effective magnetic field is present is inevitably created, reducing exhaust efficiency

Engineering Contradiction:
Improveexhaust efficiencyVSAvoidelectrode configuration complexity
Core Design Contradiction:
ProductivityVSDevice complexity

Solution Approach 1:

The patent divides the electrode system into multiple disc-shaped electrodes arranged in sequence between the inner and outer casings. Each electrode is positioned at a predetermined interval, creating multiple discrete magnetic field zones. This segmentation eliminates the saddle point by ensuring continuous magnetic field coverage across the entire getter surface, thereby improving exhaust efficiency without requiring a fundamentally different structural approach

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent positions each disc-shaped electrode locally to create specific magnetic field zones. The electrodes are arranged such that the magnetic field is concentrated and effective in each local region between the inner and outer casings. This local optimization ensures that every portion of the getter surface receives adequate magnetic field exposure, eliminating the saddle point while maintaining a manageable structural complexity

Inventive Principle:
Principle #3Local quality

2Productivity

If electrodes are provided only in conventional positions, then the structure is simpler, but no effective magnetic flux is present in portions where electrodes are provided, creating a saddle point

Engineering Contradiction:
Improveexhaust efficiencyVSAvoidnumber of electrodes
Core Design Contradiction:
ProductivityVSDevice complexity

Solution Approach 1:

The patent introduces multiple disc-shaped electrodes positioned at predetermined intervals between the inner and outer casings. This segmentation of the electrode system creates multiple effective magnetic field zones, ensuring that magnetic flux is present in all portions of the getter surface. The segmented approach increases the number of electrodes but eliminates the saddle point, achieving the desired improvement in exhaust efficiency

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent arranges electrodes in a multi-dimensional configuration between the inner and outer casings, extending the electrode system along the axial dimension. This dimensional arrangement ensures that magnetic field coverage is achieved throughout the entire volume, eliminating the saddle point that would exist in a single-plane electrode configuration

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration allows for improved exhaust efficiency by ensuring that electric and magnetic fields are utilized in all portions of the getter surface, effectively eliminating saddle points and enhancing gas evacuation capabilities.

Implementation Method 1

electric fields and magnetic fields in all portions of a getter surface

Methodology Applied
Scientific EffectElectric field: Electric Field

Implementation Method 2

a magnetic flux is generated between the outer circumferential electrode 21 and the inner circumferential electrode 22

Methodology Applied
Scientific EffectMagnetic field: Magnetic Field

Data Source

PatentEP2562786B1Ion pump system
Publication Date: 2019.06.26 NAT INST OF INFORMATION & COMM TECH
  • EP2562786B1 patent drawingFigure 1
  • EP2562786B1 patent drawingFigure 2
  • EP2562786B1 patent drawingFigure 3

AI summary

Disclosed is an ion pump system capable of efficaciously utilizing electrical fields and magnetic fields in all portions of a getter face, and thus of substantially improving exhaust efficiency. In particular, the present disclosure is based on the discovery that disposing a plurality of disc-shaped electrodes upon an internal casing (12) and further disposing a plurality of disc-shaped electrodes also upon an external casing (11) eliminates saddle points, allowing efficacious utilization of electrical fields and magnetic fields in all portions of the getter face, and thus substantially improving exhaust efficiency.