Ion Pump Vibration Damping via Mass-Based Damper
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Solution Overview
Problem
Ion pumps in vacuum systems, such as scanning electron microscopes, experience resonance issues due to low natural frequency, leading to vibration noise that limits inspection quality and accuracy.
Innovation Solution
The implementation of a damper and reinforced connections between the ion pump and the vacuum system to increase the natural frequency of the ion pump, reducing resonance and vibration propagation, which includes using a mass-based damper and active-mass damper systems to attenuate vibrations.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Device complexity
If the ion pump uses a simple connection structure to the vacuum system, then the device complexity is reduced and ease of manufacture is improved, but the natural frequency remains low causing resonance and vibration noise
Solution Approach 1:
The patent applies beforehand cushioning by incorporating a damper component into the connection structure between the ion pump and vacuum system. This damper is designed in advance to absorb and attenuate vibrations before they can propagate to the vacuum system, thereby preventing vibration noise and resonance issues while maintaining a relatively simple overall structure.
Solution Approach 2:
The patent employs composite materials by combining the ion pump body with a damper component made of vibration-damping materials. This composite structure integrates both mechanical support and vibration attenuation functions, increasing the natural frequency of the connection structure while reducing resonance susceptibility without significantly complicating the device.
2Ease of manufacture
If the ion pump operates without vibration damping components, then the device complexity and manufacturing cost are reduced, but resonance with low-frequency vibrations occurs reducing inspection quality
Solution Approach 1:
The patent introduces an intermediary component - the damper - positioned between the ion pump and the vacuum system. This intermediary absorbs and dissipates vibrational energy, preventing direct transmission of resonance to the vacuum system. The damper acts as a buffer that protects the precision inspection system from vibration-induced noise while adding minimal manufacturing complexity.
3Object-affected harmful factors
If reinforced connections are used to increase natural frequency, then resonance is reduced and vibration propagation is minimized, but the device complexity and manufacturing difficulty increase
Solution Approach 1:
Rather than over-reinforcing the entire connection structure, the patent applies beforehand cushioning by strategically placing a damper component at the connection point. This targeted approach increases the effective natural frequency and reduces resonance by absorbing vibrational energy, achieving the desired vibration control without the need for complex reinforced structures throughout the entire assembly.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach significantly reduces the likelihood of resonance with low-frequency vibrations, enhancing the inspection quality and accuracy of the scanning electron microscope by minimizing vibration-induced noise.
Implementation Method 1
The implementation of a damper and reinforced connections between the ion pump and the vacuum system to increase the natural frequency of the ion pump, reducing resonance and vibration propagation
Implementation Method 2
significantly reduces the likelihood of resonance with low-frequency vibrations
Data Source
AI summary
Apparatuses and systems for damping vibration of a vacuum vessel mounted with a pump include a pump body and a damping element coupled to the pump body, wherein the pump body and the damping element form a mass-based damper, and wherein the pump body forms a mass component of the mass-based damper; and the damping element forms a damping component of the mass-based damper. The apparatuses and systems also include a pump body configured to be secured to a column of a charged-particle inspection apparatus, a sensor coupled to the pump body, an actuator coupled to the pump body, and a circuitry communicatively coupled to the sensor and the actuator for receiving motion data indicative of a vibration of the column; determining a damping based on the motion data; and actuate the actuator to react to the vibration of the column in accordance with the damping.