Ion Getter Pump Control for Safe NEG Regeneration
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Solution Overview
Problem
Existing vacuum systems require additional monitoring and technical steps to ensure safe regeneration of non-evaporable getter (NEG) material during the regeneration process, which can lead to destruction if pressures are not maintained below specific thresholds.
Innovation Solution
A method where the operating voltage of the ion getter pump is reduced but not turned off, allowing it to measure pressure and control the heating element of the NEG for regeneration, ensuring the regeneration occurs at safe pressures without additional monitoring means.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If additional monitoring means and technical steps are implemented to ensure safe regeneration of NEG material, then the reliability of regeneration process is improved, but the device complexity increases
Solution Approach 1:
The ion getter pump is made multi-functional by enabling it to operate both as a vacuum pump and as a pressure gauge simultaneously. By reducing the operating voltage to a range where pumping action is negligible but ion current remains proportional to pressure, the same device serves dual purposes, eliminating the need for separate monitoring means and reducing system complexity while maintaining regeneration reliability
Solution Approach 2:
The system implements self-service by using the ion getter pump's own ion current signal to control the regeneration process. The pump automatically regulates its own operation by providing feedback through its ion current, which is used to control the heating element, eliminating the need for external monitoring and control systems
2Object-affected harmful factors
If the ion getter pump is completely switched off during NEG regeneration, then material deposition on the pump is prevented, but pressure monitoring capability is lost
Solution Approach 1:
The operating voltage of the ion getter pump is changed to a specific range (below a fourth threshold value) during NEG regeneration. This parameter change reduces the pumping action to negligible levels, preventing material deposition, while simultaneously maintaining the ion current's proportionality to pressure, thus preserving pressure monitoring capability without complete shutdown
Solution Approach 2:
The system dynamically adjusts the operating voltage of the ion getter pump based on the regeneration phase. During normal operation, full voltage is applied for pumping; during NEG regeneration, voltage is reduced to a specific range to enable dual function as pressure gauge while minimizing pumping action, optimizing performance for each operational phase
3Measurement precision
If the operating voltage of ion getter pump is reduced to enable pressure measurement, then the pump capacity decreases, but pressure monitoring during regeneration is enabled
Solution Approach 1:
The operating voltage of the ion getter pump is dynamically adjusted based on operational phase. During NEG regeneration, voltage is reduced to enable pressure measurement function. During normal vacuum pumping operations, full voltage is restored to maximize pump capacity, allowing the system to optimize between measurement and pumping functions as needed
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This method allows for secure and reliable regeneration of the NEG material by utilizing the ion getter pump as a pressure gauge, preventing material deposition and ensuring regeneration only at safe pressures, thereby reducing the risk of NEG material destruction.
Implementation Method 1
By means of the high voltage electrons are accelerated from the cathode to the anode and thereby ionise gas particles
Implementation Method 2
the molecules and gas particles bonded to the surface of the NEG material are buried within the NEG material by diffusion
Data Source
AI summary
Method for the regeneration of a volume getter pump in a vacuum apparatus with a volume getter pump and an ion getter pump where the operating voltage of the ion getter pump is reduced, the current through the ion getter pump is recorded for determination of the pressure in the vacuum apparatus and then a heating element of the NEG is controlled as a function of the current of the ion getter pump for the purpose of heating the NEG material.