Ion Sensor Insulator Resolves FAIMS Discharge Contradiction
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Solution Overview
Problem
Existing FAIMS systems suffer from low detectivity due to the gap between the ion filter and the ion sensing electrode, which leads to ion dispersion and increased ion loss, and shortening this gap can result in unwanted electric discharge.
Innovation Solution
Incorporating a solid insulator between the ion filter and the ion sensing electrode to reduce ion loss while preventing electric discharge, and using an asymmetric electric field waveform to selectively direct ions to the sensing electrode, thereby enhancing detectivity and structural stability.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If the distance between the ion filter and the ion sensing electrode is shortened, then ion loss is reduced and detectivity is improved, but unwanted electric discharge occurs between the ion filter and the ion sensing electrode
Solution Approach 1:
The patent introduces a third electrode positioned between the ion filter and the ion sensing electrode. This intermediate electrode acts as a mediator that prevents direct electric discharge between the ion filter and sensing electrode while maintaining a short effective distance for ion detection, thus resolving the contradiction between reducing ion loss and preventing electric discharge.
2Object-affected harmful factors
If a gap of centimeter order exists between the ion filter and the ion sensing electrode, then electric discharge is prevented, but ion spatial dispersion increases and ion loss increases
Solution Approach 1:
The third electrode serves as an intermediary structure that enables the system to maintain a physically small gap distance while effectively preventing electric discharge. The intermediate electrode divides the gap into two smaller regions, each with lower electric field strength, thereby preventing discharge while maintaining short ion travel distance and reducing ion loss.
3Stability of the object's composition
If the distance between the ion filter and the ion sensing electrode is shortened, then ion spatial dispersion is reduced, but the structure becomes more prone to electric discharge
Solution Approach 1:
The third electrode maintains stable ion spatial distribution by keeping the physical gap short, while simultaneously ensuring discharge resistance by acting as an intermediate barrier that reduces the electric field strength in each sub-gap region, thus maintaining both ion spatial stability and discharge resistance.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution achieves high detectivity by minimizing ion loss and preventing electric discharge, while maintaining a close proximity of the ion filter and sensing electrode, and allows for precise detection of various ions through the asymmetric electric field configuration.
Implementation Method 1
ionized chemical substances are sorted according to a difference in the degree of mobility as the ionized chemical substances flow through the ion filter
Implementation Method 2
ions tend to spatially disperse due to dispersion and the Coulomb repulsive force
Implementation Method 3
a solid insulator that electrically insulates the ion sensing electrode from the first electrode and the second electrode
Implementation Method 4
As ionized chemical substances that have passed through the ion filter collide with an ion sensing electrode, and electric current is generated at the ion sensing electrode
Data Source
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AI summary
An ion sensor, an ion sensor manufacturing method, and a field asymmetric ion mobility spectrometry (FAIMS) system. The ion sensor includes an ion filter (110) including a first electrode (111, 411, 480, 680) and a second electrode (112, 412, 480) facing each other, an ion sensing electrode (120, 220, 320, 460, 560, 680) with which an ion that has passed through the ion filter (110) collides, and an insulator (130, 470, 660, 670) configured to electrically insulate the ion sensing electrode (120, 220, 320, 460, 560, 680) from the first electrode (111, 411, 480, 680) and the second electrode (112, 412, 480). The method includes forming a first slit (481) on an active layer (480, 680) of an at least one SOI substrate (450, 470, 480, 550, 650), dividing the active layer (480, 680) into two, and forming a second slit (461) through the base layer (460, 463, 560, 660).