Ion Source Aluminum Electrode Merging Plasma Generation
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Solution Overview
Problem
Existing ion sources for generating aluminum ions in ion implantation processes require a separate plate for plasma generation, leading to increased complexity and a higher number of components.
Innovation Solution
An ion source design that integrates a plasma generating chamber with a hot cathode and an opposing reflecting electrode made of aluminum-containing material, along with a magnet to generate a magnetic field, allowing for the emission of aluminum ions directly from these components without the need for a separate aluminum ion generation plate.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a separate plate formed of aluminum containing material is provided apart from plasma generation components, then aluminum ions can be generated, but the number of items increases and the structure becomes complicated
Solution Approach 1:
The invention merges the aluminum ion generation function with the plasma generation components by forming an aluminum-containing film directly on the plasma generation electrode. This eliminates the need for a separate aluminum-containing plate, thereby reducing the number of components and simplifying the overall structure while maintaining reliable aluminum ion generation capability.
Solution Approach 2:
The plasma generation electrode is given multi-functionality by coating it with an aluminum-containing film. This allows the same component to serve both plasma generation and aluminum ion supply functions, reducing device complexity while ensuring effective aluminum ion generation for the ion beam.
2Reliability
If a separate plate formed of aluminum containing material is provided apart from plasma generation components, then aluminum ions can be generated, but the number of items increases
Solution Approach 1:
The invention combines the aluminum ion generation function into the plasma generation electrode by forming an aluminum-containing film on it. This integration eliminates the need for a separate aluminum-containing plate, directly reducing the quantity of components while preserving the aluminum ion generation capability.
Solution Approach 2:
The plasma generation electrode is enhanced with multi-functionality through the aluminum-containing film coating, enabling it to perform both plasma generation and aluminum ion supply. This reduces the total number of components required in the ion source apparatus.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This design simplifies the structure, reduces the number of components, and enhances the generation of high-density plasma, resulting in a more efficient production of aluminum ions for ion implantation.
Implementation Method 1
a magnet which generates a magnetic field along a line connecting the hot cathode and the opposing reflecting electrode, in the plasma generating chamber
Implementation Method 2
a hot cathode provided on one side in the plasma generating chamber
Implementation Method 3
an opposing reflecting electrode which is provided on other side in the plasma generating chamber to oppose to the hot cathode and is isolated electrically from the plasma generating chamber, to which a voltage that is negative in contrast to a potential of the plasma generating chamber is applied, and which reflects electrons in the plasma generating chamber
Implementation Method 4
a plasma generating chamber which is also used as an anode and generates a plasma in an interior, and into which an ionization gas containing fluorine is introduced
Data Source
AI summary
An ion source includes a plasma generating chamber into which an ionization gas containing fluorine is introduced, a hot cathode provided on one side in the plasma generating chamber, an opposing reflecting electrode which is provided on other side in the plasma generating chamber and reflects electrons when a negative voltage is applied from a bias power supply to the opposing reflecting electrode, and a magnet for generating a magnetic field along a line, which connects the hot cathode and the opposing reflecting electrode, in the plasma generating chamber. The opposing reflecting electrode is formed of an aluminum containing material.