Gas Field Ion Source Emitter Tip Vibration Isolation
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Solution Overview
Problem
Existing ion beam devices with gas field ion sources face challenges in adjusting the position and direction of the emitter tip, leading to degraded focusing performance and reduced ion beam luminance due to mechanical constraints and vibration from cooling mechanisms, which affect high-resolution sample observation.
Innovation Solution
The ion beam device incorporates a gas field ion source with an inclinable emitter tip and a vibration-proofing mechanism to stabilize the emitter tip, allowing for precise adjustment of the emitter tip's position and direction, and utilizes a cooling system that minimizes vibration transmission to the emitter tip, enhancing focusing performance and ion beam luminance.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Illumination intensity
If the emitter tip is cooled to extremely low temperature to increase ion emission current density, then the ion beam luminance is improved, but mechanical vibration from the cooling mechanism degrades the focusing performance and observation resolution
Solution Approach 1:
The gas ionization chamber is segmented into a fixed portion and a movable portion, allowing the emitter tip to be adjusted independently from the cooling mechanism. This segmentation enables the emitter tip to be positioned precisely while the cooling system operates separately, reducing vibration transmission to the emitter tip.
Solution Approach 2:
A vibration isolation mechanism is introduced as an intermediary between the cooling mechanism and the emitter tip. This intermediary component absorbs and reduces mechanical vibrations from the cooling system before they reach the emitter tip, allowing both cooling functionality and focusing performance to be maintained.
2Manufacturing precision
If the position and direction of the emitter tip are adjusted to optimize ion beam direction, then the focusing performance is improved, but mechanical constraints and vibration from the adjustment mechanism reduce ion beam luminance
Solution Approach 1:
The emitter tip is designed with dynamic adjustability, allowing its position and direction to be changed during operation. The gas ionization chamber enables the emitter tip to be inclined and positioned at optimal angles while maintaining a stable environment for high ion beam luminance through the vibration isolation mechanism.
3Quantity of substance
If the gas pressure around the emitter tip is increased to increase molecular density and ion emission, then the ion beam current is improved, but ion beam collides with neutral gas and neutralizes, reducing ion current
Solution Approach 1:
The gas ionization chamber creates a localized region with high gas molecular density around the emitter tip, while the surrounding vacuum chamber maintains low pressure. This local quality differentiation allows high ion emission from the emitter tip while minimizing neutralization of the ion beam during transmission.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration enables high-resolution sample observation by maintaining precise control over the ion beam's direction and reducing mechanical vibrations, resulting in improved focusing performance and increased ion beam luminance, allowing for more accurate sample analysis.
Implementation Method 1
a gas field ion source (1) for generating an ion beam
Implementation Method 2
the emitter tip is cooled to an extremely low temperature, and the temperature of the gas around the emitter tip is to be lowered
Implementation Method 3
a base plate (18) supporting the sample chamber (3), the vacuum chamber (68), and the gas field ion source (1), wherein the base plate (18) includes a vibration proofing mechanism (19) for reducing vibration from being transmitted to the gas field ion source (1), the vacuum chamber (68), and the sample chamber (3)
Data Source
AI summary
An ion beam device according to the present invention includes a gas field ion source (1) including an emitter tip (21) supported by an emitter base mount (64), a ionization chamber (15) including an extraction electrode (24) and being configured to surround the emitter tip (21), and a gas supply tube (25). A center axis line of the extraction electrode (24) overlaps or is parallel to a center axis line (14A) of the ion irradiation light system, and a center axis line (66) passing the emitter tip (21) and the emitter base mount (64) is inclinable with respect to a center axis line of the ionization chamber (15). Accordingly, an ion beam device including a gas field ion source capable of adjusting the direction of the emitter tip is provided.