Rounded Strap Fastener for Ion Source Faceplate Arcing Reduction

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Solution Overview

Problem

Traditional means of securing the faceplate to the arc chamber in an ion source create regions of high electrostatic stress, increasing the risk of arcing to nearby components.

Innovation Solution

A fastener system using straps with rounded portions and a tension system to secure the faceplate to the chamber walls, reducing electrostatic stress by increasing the radius of curvature and applying a controlled compression force.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If traditional means are used to secure the faceplate to the arc chamber, then the faceplate is firmly attached, but regions of high electrostatic stress are created increasing the risk of arcing

Engineering Contradiction:
Improvearc risk reductionVSAvoidelectrostatic stress
Core Design Contradiction:
ReliabilityVSStress or pressure

Solution Approach 1:

The patent applies curvature by replacing traditional sharp-cornered fasteners with straps featuring rounded portions. The rounded geometry increases the radius of curvature at stress concentration points, which redistributes and reduces electrostatic stress fields. This directly addresses the arcing problem by eliminating sharp edges that create high electric field gradients, while maintaining secure mechanical attachment of the faceplate to the arc chamber.

Inventive Principle:
Principle #14Spheroidality (Curvature)

Solution Approach 2:

The patent changes the geometric parameters of the fastening component by introducing rounded portions with specific radii of curvature. This parameter modification transforms the electrostatic stress distribution pattern, reducing peak stress values that would otherwise occur at sharp corners. The controlled compression force applied by the tension system further modifies the contact parameters between the strap and faceplate, optimizing both mechanical securement and electrostatic performance.

Inventive Principle:
Principle #35Parameter changes

2Reliability

If a tension system with springs is used to apply compression force, then the faceplate is securely pressed against the chamber walls, but the device complexity increases

Engineering Contradiction:
Improvefaceplate securementVSAvoidfastener system complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The tension system incorporates springs that automatically apply compression force to press the strap against the faceplate. This self-service mechanism eliminates the need for external actuation or complex control systems - the springs naturally maintain the required contact pressure through their elastic recovery, ensuring reliable faceplate securement while keeping the overall system relatively simple.

Inventive Principle:
Principle #25Self-service

Solution Approach 2:

The fastening function is segmented into distinct components: the strap with rounded portions for stress reduction, the tension system with springs for force application, and the attachment mechanism for securing to the chamber. This segmentation allows each component to be optimized independently and facilitates easier manufacturing, assembly, and maintenance compared to an integrated complex fastening system.

Inventive Principle:
Principle #1Segmentation

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Reduces electrostatic stress by at least 15%, minimizing arcing risk and enhancing system throughput and availability.

Implementation Method 1

The tension system includes at least one spring associated with each strap to press the faceplate against the tops of the chamber walls

Methodology Applied
Scientific EffectElasticity: Elasticity

Data Source

PatentUS12406822B2Fastener for securing faceplate to ion source
Publication Date: 2025.09.02 APPLIED MATERIALS INC
  • US12406822B2 patent drawing
  • US12406822B2 patent drawing
  • US12406822B2 patent drawing

AI summary

A fastener for securing a faceplate to the chamber walls of an ion source is disclosed. The ion source rests on a source housing having a flange. The fastener includes two straps, which have a cross-section resembling a rounded rectangle. Each strap has two attachment portions and an engagement portion, which rests against an outer surface of the faceplate. The attachment portions pass through openings in the flange and are attached to a tension system that is disposed on the opposite side of the flange. The tension system includes at least one spring associated with each strap to press the faceplate against the tops of the chamber walls. The shape of the straps results in reduced electrostatic stress between the faceplate and the extraction electrode that is located near the faceplate.