Ion Source Gas Delivery Manifold with Repeller-Proximal Outlet
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Solution Overview
Problem
Ion sources face challenges in efficiently handling large molecular compounds like C2B10H12, including limited recharge intervals, wall reactions leading to clogging, pyrolysis, and difficulty in switching between different species due to heat transfer and condensation issues.
Innovation Solution
The design includes an arc chamber with a manifold assembly that directs gas flow closer to the repeller than the electron-emitting element, a crucible with tamper-resistant features, and a cooled separator wall to prevent cross-talk between crucibles, minimizing pyrolysis and condensation, and allowing for independent operation of multiple crucibles.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Duration of action of moving object
If a standard-sized crucible is used to hold large molecular compound powder, then the crucible size is compact, but the recharge interval is too short due to insufficient material capacity
Solution Approach 1:
The crucible is divided into a lower crucible body and an upper extender section, creating a segmented structure that increases total capacity while maintaining a compact footprint. The extender section stacks above the main crucible body, effectively segmenting the material storage into vertical zones.
Solution Approach 2:
The crucible design transitions from a two-dimensional horizontal expansion to a three-dimensional vertical structure. By extending upward rather than outward, the crucible increases material capacity without increasing the horizontal space required in the ion source chamber.
2Productivity
If material is vaporized in a standard ion source, then ionization occurs, but wall reactions cause condensation and clogging on contacted surfaces
Solution Approach 1:
A heated shroud acts as an intermediary thermal zone between the hot vaporization region and the cooler chamber walls. This intermediate structure captures and redirects vapor flow, preventing direct contact with cold surfaces where condensation would occur.
Solution Approach 2:
The shroud is heated to an intermediate temperature that creates a thermal gradient, changing the temperature parameter along the vapor path. This gradual temperature transition prevents sudden condensation by maintaining vapor above its dew point through the transition zone.
3Productivity
If heat is applied to vaporize one species in a multi-crucible ion source, then that species is ionized, but heat transfer causes unintended vaporization of other species
Solution Approach 1:
The ion source is segmented into multiple independent crucible zones, each with its own heating and vaporization pathway. The cooled partition wall physically segments the thermal fields, allowing independent control of each species without thermal cross-contamination.
Solution Approach 2:
The passive thermal conduction mechanism is replaced with active cooling of partition walls. By introducing a controlled cooling system at the boundaries between crucibles, the design substitutes uncontrolled heat transfer with managed thermal boundaries.
4Device complexity
If the gas outlet is positioned near the electron-emitting element, then the ionization zone is compact, but pyrolysis occurs due to excessive heat exposure
Solution Approach 1:
The gas outlet positioning creates an asymmetric flow pattern where vapor is directed away from the hottest region (electron-emitting element) toward a cooler zone. This asymmetric placement optimizes the thermal gradient to prevent pyrolysis while maintaining compact ionization geometry.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration extends the time between refills, reduces clogging and pyrolysis, and enables simultaneous operation of multiple species without unintended vaporization, enhancing the stability and efficiency of ionization for large molecular compounds.
Implementation Method 1
The arc chamber has an electron-emitting element
Implementation Method 2
Electrons generated by the ion source will ionize a dopant gas to produce a plasma
Implementation Method 3
The arc chamber has an electron-emitting element and a repeller
Implementation Method 4
a cooled separator wall to prevent cross-talk between crucibles, minimizing pyrolysis and condensation
Implementation Method 5
C2B10H12 and other large molecules require a large reservoir of powder that is vaporized or sublimed to produce the vapor used in the ion source
Implementation Method 6
C2B10H12 and other large molecules require a large reservoir of powder that is vaporized or sublimed to produce the vapor used in the ion source
Implementation Method 7
The gas outlet is closer to the repeller than the electron-emitting element
Implementation Method 8
The manifold assembly defines a cavity and a gas outlet, the gas outlet configured to allow gas flow to the arc chamber
Data Source
AI summary
An ion source has an arc chamber with an electron-emitting element and a repeller. A manifold assembly defines a cavity and a gas outlet configured to allow gas flow to the arc chamber. This gas outlet is closer to the repeller than the electron-emitting element. In one embodiment, the ion source has a first crucible and a second crucible. The first crucible and the second crucible are connected to the manifold assembly. In one instance, the crucibles have tamper-resistant features.