Ion Source Shielding Member for Abnormal Discharge Prevention
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Solution Overview
Problem
Conventional ion sources experience frequent abnormal discharge due to insulating films formed by by-products, leading to reduced ion beam current and potential failures in ion implantation apparatuses, requiring frequent maintenance.
Innovation Solution
An ion source with a shielding member made of conductive metal, featuring protruding support portions that fit at a distance from the vacuum chamber's inner wall, preventing deposition of insulating materials on the chamber walls and maintaining a high temperature to reduce resistance and prevent abnormal discharge, while being easily attachable and detachable for maintenance.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a conventional ion source operates without a shielding member, then the structure is simple and ease of manufacture is improved, but insulating films deposit on the vacuum chamber inner wall causing abnormal discharge and reducing reliability
Solution Approach 1:
A shielding member made of conductive metal is introduced as an intermediary component between the ion generation container and the vacuum chamber inner wall. This shielding member intercepts insulating material by-products before they can deposit on the vacuum chamber, preventing abnormal discharge while maintaining structural manageability through standardized design
Solution Approach 2:
The shielding member is divided into a main body and separate support portions, allowing independent optimization of each component. The main body provides the shielding function while the support portions provide mounting functionality, enabling modular manufacturing and assembly that balances complexity with reliability benefits
2Reliability
If the shielding member is positioned close to the vacuum chamber wall for effective shielding, then abnormal discharge prevention is improved, but the shielding member temperature decreases causing increased resistance and potential discharge
Solution Approach 1:
The support portions are designed with localized contact points on the vacuum chamber inner wall, creating thermal isolation between the cooled chamber wall and the main body of the shielding member. This local quality differentiation allows the shielding member to maintain high temperature for low resistance while still providing effective shielding when positioned close to the chamber wall
3Manufacturing precision
If the shielding member is fixed rigidly to the vacuum chamber for stable positioning, then positioning precision is improved, but maintenance becomes difficult requiring chamber disassembly
Solution Approach 1:
The shielding member is segmented into a main body and detachable support portions, allowing the support portions to be removed separately for maintenance. This segmentation enables easy access to the ion generation container for cleaning and maintenance while maintaining precise positioning during operation through the support portions
Solution Approach 2:
The support portions are designed to be detachable rather than permanently fixed, providing dynamic adaptability between operational stability and maintenance accessibility. The support portions can be attached during operation for precise positioning and detached during maintenance for easy access, optimizing both positioning precision and ease of repair at different operational phases
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution effectively reduces the occurrence of abnormal discharge, prolongs the maintenance cycle, and ensures reliable operation by maintaining the shielding member's high temperature and stabilizing electrical connections, thereby enhancing the ion source's efficiency and reliability.
Implementation Method 1
a cooling mechanism for cooling the vacuum chamber to a predetermined temperature by circulating a refrigerant
Implementation Method 2
a shielding member provided inside and in the vicinity of an inner wall of the vacuum chamber, and having a main body made of a conductive metal for blocking deposition of an insulating material on the inner wall of the vacuum chamber
Implementation Method 3
the main body of the shielding member is provided with a plurality of protruding support portions that is in contact with the inner wall of the vacuum chamber for supporting the main body so that the main body is fitted at a distance from the inner wall of the vacuum chamber
Implementation Method 4
maintaining the shielding member's high temperature and stabilizing electrical connections, thereby enhancing the ion source's efficiency and reliability
Data Source
Figure 1
Figure 2~3
Figure 4(a)~4(b)
AI summary
Providing a technique for preventing abnormal discharge caused by an insulating film formed as a by-product by reacting an ionized gas with an ion source and generating ions in an ion generation container of an ion source. An ion source includes a vacuum chamber (10A) having a cooling mechanism, an ion generation container (11) provided in the vacuum chamber (10A), for reacting an ionized gas with an ion material so as to generate ions, an extraction electrode (15) provided in the vacuum chamber (10A), for extracting ions generated in the ion generation container (11) and generating an ion beam, and a shielding member (30) provided inside and in the vicinity of an inner wall (10d) of the vacuum chamber (10A), and having a main body (31) made of a conductive metal for blocking deposition of an insulating material on the inner wall (10d) of the vacuum chamber (10A). The main body (31) of the shielding member (30) has a plurality of protruding support portions (32) that is in contact with the inner wall (10d) of the vacuum chamber (10A) for supporting the main body (31) in a manner such that the main body (31) is fitted at a distance from the inner wall (10d) of the vacuum chamber (10A).