Ion Source Vaporizer Control for Faster Ion Species Switching

Solution Overview

Problem

Frequent switching of ion species in ion implanters is time-consuming due to the need for oven temperature control, which decreases productivity by prolonging the switching time and increasing the time required for temperature adjustments.

Innovation Solution

An ion source with a vaporizer that produces a reaction product by reacting a reactive gas with a solid material, where the crucible is heated to vaporize the product, and a separate gas supply line is used to control the plasma chamber, allowing for quicker switching by stopping the reactive gas supply and using a second gas source, thereby reducing the need for extensive oven temperature control.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Adaptability or versatility

If the oven temperature is controlled to switch ion species, then the ion species can be switched, but the switching time increases and productivity decreases

Engineering Contradiction:

Improveion species switching capabilityVSAvoidswitching time

Core Design Contradiction:

Adaptability or versatilityVSLoss of time

Solution Approach 1:

The system pre-heats the crucible to the required temperature before ion species switching is needed. By performing the heating action in advance, the system eliminates the time delay that would otherwise occur during actual switching operations, allowing immediate transition between ion species when required.

Inventive Principle:

Principle #10Preliminary action

Solution Approach 2:

The system dynamically adjusts the heating state of the crucible based on operational requirements. The crucible can be rapidly heated or cooled as needed, transforming the static temperature control system into a dynamic one that responds quickly to switching demands, thereby reducing switching time while maintaining versatility.

Inventive Principle:

Principle #15Dynamics

2Adaptability or versatility

If the oven temperature is adjusted frequently for ion species switching, then different ion species can be produced, but the heater deteriorates faster and power consumption increases

Engineering Contradiction:

Improveion species varietyVSAvoidpower consumption

Core Design Contradiction:

Adaptability or versatilityVSUse of energy by moving object

Solution Approach 1:

The crucible is pre-heated to the required temperature before ion species switching is needed. By performing the heating action in advance, the system eliminates the need for repeated heating cycles during actual switching operations, thereby reducing power consumption and minimizing heater deterioration while maintaining the ability to produce various ion species.

Inventive Principle:

Principle #10Preliminary action

3Adaptability or versatility

If the oven temperature is controlled for ion species switching, then the ion species can be switched, but the productivity of the ion implanter decreases

Engineering Contradiction:

Improveion species switching capabilityVSAvoidion implanter productivity

Core Design Contradiction:

Adaptability or versatilityVSProductivity

Solution Approach 1:

The system pre-heats the crucible to the required temperature before ion species switching is needed. By performing the heating action in advance, the system eliminates the time delay that would otherwise occur during actual switching operations, allowing immediate transition between ion species when required, thereby maintaining versatility while significantly improving productivity.

Inventive Principle:

Principle #10Preliminary action

Solution Approach 2:

The system dynamically adjusts the heating state of the crucible based on operational requirements. The crucible can be rapidly heated or cooled as needed, transforming the static temperature control system into a dynamic one that responds quickly to switching demands, thereby reducing switching time while maintaining the ability to produce various ion species.

Inventive Principle:

Principle #15Dynamics

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration significantly reduces the time required for switching ion species, enhancing the productivity of ion implanters by simplifying the control process and minimizing power consumption and heater deterioration.

Implementation Method 1

vaporizes the reaction product by heating the crucible with a heater

Methodology Applied

Scientific EffectVaporization: Evaporation

Implementation Method 2

supplying, through a first gas supply line to a crucible in which a solid material is installed, a reactive gas that reacts with the solid material

Methodology Applied

Scientific EffectChemical reaction: Chemical Bonding

Implementation Method 3

a plasma chamber to which a vapor is supplied from the vaporizer through a vapor supply line configured to generate a plasma from the vapor or from a source gas supplied thereto

Methodology Applied

Scientific EffectPlasma generation: Plasma

Data Source

PatentUS20240038499A1Ion source and operating method thereof

Publication Date: 2024.02.01 NISSIN ION EQUIPMENT CO LTD

AI summary

An ion source includes a vaporizer, a plasma chamber, and a controller. The vaporizer produces a reaction product by supplying, through a first gas supply line to a crucible in which a solid material is installed, a reactive gas that reacts with the solid material, and vaporizes the reaction product by heating the crucible with a heater. The plasma chamber is supplied with a vapor from the vaporizer through a vapor supply line, and has a second gas supply line connected to the plasma chamber separately from the vapor supply line. The controller controls the heater to heat the crucible while a gas is being supplied from the second gas supply line to the plasma chamber and stops a supply of the reactive gas through the first gas supply line to the crucible.