Ion Trap Fabrication via Wafer Bonding

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Solution Overview

Problem

Current methods for fabricating ion traps are expensive, time-consuming, and challenging to scale and fine-tune, limiting the development of quantum information processing technologies.

Innovation Solution

A method combining semiconductor-processing and 3D integration techniques using wafer-to-wafer bonding to form ion traps with precise electrode positioning, enabling scalable and repeatable manufacturing of ion traps with improved trapping performance and uniformity.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Adaptability or versatility

If manual assembly and optimization methods are used for ion trap fabrication, then flexibility and customization are improved, but manufacturing cost and time consumption increase significantly

Engineering Contradiction:
ImproveflexibilityVSAvoidmanufacturing efficiency
Core Design Contradiction:
Adaptability or versatilityVSProductivity

Solution Approach 1:

The ion trap system is divided into separate modular components: electrode structures are fabricated on individual semiconductor wafers, which are then bonded together to form the complete ion trap assembly. This segmentation enables parallel processing of multiple wafer batches, significantly improving manufacturing throughput while maintaining design flexibility through modular reconfiguration.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

Electrode structures are pre-fabricated on semiconductor wafers using standardized photolithography and thin-film deposition processes before final assembly. This preliminary fabrication allows for high-volume production of electrode components with precise geometric control, reducing on-site assembly time and cost while maintaining manufacturing flexibility.

Inventive Principle:
Principle #10Preliminary action

2Adaptability or versatility

If manual assembly methods are used for ion trap fabrication, then customization capability is improved, but manufacturing precision and repeatability deteriorate

Engineering Contradiction:
Improvecustomization capabilityVSAvoidpositioning accuracy
Core Design Contradiction:
Adaptability or versatilityVSManufacturing precision

Solution Approach 1:

Manual mechanical assembly operations are replaced with wafer bonding technology, which uses controlled thermal and/or mechanical processes to join electrode structures with sub-micrometer precision. This substitution eliminates human positioning errors while maintaining the ability to customize ion trap geometries through programmable bonding parameters and pre-designed electrode patterns.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The bonding process parameters (temperature, pressure, time) are precisely controlled and optimized to achieve consistent sub-micrometer alignment between electrode structures and ion cavity components. By adjusting these parameters, the system maintains manufacturing precision across different ion trap designs and scales, enabling both customization and repeatability.

Inventive Principle:
Principle #35Parameter changes

3Ease of manufacture

If conventional fabrication methods are used for ion traps, then ease of manufacture is improved, but scalability and uniformity of performance deteriorate

Engineering Contradiction:
Improvefabrication simplicityVSAvoidscalability
Core Design Contradiction:
Ease of manufactureVSProductivity

Solution Approach 1:

The semiconductor wafer fabrication platform serves multiple functions: it fabricates electrode structures, defines ion cavity geometries, and enables mass production through standardised batch processing. This universal approach allows the same manufacturing infrastructure to produce various ion trap configurations (linear, planar, 3D) at scale, achieving both ease of manufacture and scalability simultaneously.

Inventive Principle:
Principle #6Universality (Multi-functionality)

4Manufacturing precision

If wafer bonding technology is used for ion trap fabrication, then manufacturing precision and repeatability are improved, but process complexity increases

Engineering Contradiction:
Improvepositioning accuracyVSAvoidprocess complexity
Core Design Contradiction:
Manufacturing precisionVSDevice complexity

Solution Approach 1:

The complex wafer bonding process is divided into separate, well-defined stages: surface preparation, alignment, bonding, and post-bonding processing. Each stage uses established semiconductor manufacturing techniques, making the overall complex process manageable and repeatable through standardized procedures at each step.

Inventive Principle:
Principle #1Segmentation

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach allows for the accurate, efficient, and scalable fabrication of ion traps, enhancing their trapping performance and capacity, particularly suitable for trapped-ion qubit devices like quantum computers.

Implementation Method 1

bonding the wafers to form an aggregate ion cavity from the cavity parts

Methodology Applied
Scientific EffectWafer bonding: Welding

Data Source

PatentEP3503160B1A method for fabrication of an ion trap
Publication Date: 2022.07.13 INTERUNIVERSITAIR MICRO ELECTRONICS CENT (IMEC VZW)
  • EP3503160B1 patent drawingFigure 1A~1B
  • EP3503160B1 patent drawingFigure 1C~1E
  • EP3503160B1 patent drawingFigure 1F~1G

AI summary

According to an aspect of the present inventive concept there is provided a method for fabrication of an ion trap, the method comprising: forming, on a first main surface of a first semiconductor wafer, a first electrode structure, forming, on a first main surface of a second semiconductor wafer, a second electrode structure, forming a first cavity part extending through the first semiconductor wafer from a second main surface thereof towards the first electrode structure, forming a second cavity part extending through the second semiconductor wafer from a second main surface thereof towards the second electrode structure, and bonding together the first semiconductor wafer and the second semiconductor wafer with the second main surface of the first semiconductor wafer facing the second main surface of the second semiconductor wafer and with the first cavity part and the second cavity part being aligned to together define an ion cavity, wherein the first electrode structure and the second electrode structure are arranged on opposite sides of the ion cavity.