Ionic Liquid Medium for Electron Microscope Charge-Up Prevention
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Solution Overview
Problem
Current methods for observing samples with electron microscopes, particularly those made of insulating materials, face challenges with charge-up issues, leading to poor image quality and sample deformation, especially when using scanning electron microscopes (SEM) and transmission electron microscopes (TEM).
Innovation Solution
The use of an ionic liquid, which is non-volatile and imparts electrical conductivity, is applied to the sample surface or impregnated into the sample to prevent charge-up and maintain the sample's original shape during observation, allowing for accurate imaging without the need for additional vapor deposition or ion shower processes.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If vapor deposition or ion shower processes are used to prevent charge-up, then charge-up prevention is improved, but device complexity and manufacturing process complexity increase
Solution Approach 1:
The patent applies parameter changes by modifying the electrical conductivity parameter of the sample through ionic liquid coating. Instead of adding complex external processes like vapor deposition or ion showers, the invention changes the intrinsic electrical property of the sample surface by applying a conductive layer, thereby enabling charge dissipation through the sample itself rather than requiring additional charge neutralization equipment or processes
Solution Approach 2:
The ionic liquid coating enables the sample to serve its own charge dissipation function. The conductive coating layer allows charges to be dissipated through the sample itself without requiring external charge neutralization systems. The sample becomes self-sufficient in managing its own electrostatic issues, eliminating the need for separate vapor deposition or ion shower processes
2Reliability
If incident amount of primary electrons is decreased to prevent charge-up, then charge-up prevention is improved, but image resolution deteriorates
Solution Approach 1:
The invention changes the electrical conductivity parameter of the sample surface by applying ionic liquid coating. This parameter change allows the use of higher primary electron acceleration voltages and incident electron amounts without causing charge-up, thereby maintaining high image resolution while preventing charge accumulation on insulating sample surfaces
3Reliability
If sample is made electrically conductive by vapor deposition, then charge-up prevention is improved, but manufacturing precision and sample original shape are compromised
Solution Approach 1:
The patent changes the electrical conductivity parameter through ionic liquid coating instead of material deposition. This approach prevents charge-up by enhancing electrical conduction without adding physical material layers that would alter the sample's original shape, surface topology, or dimensional accuracy, thereby maintaining both charge-up prevention and manufacturing precision
Solution Approach 2:
The ionic liquid acts as an intermediary substance that provides electrical conductivity without forming a permanent structural layer. It mediates between the need for charge dissipation and the requirement to preserve sample integrity, allowing charge flow while maintaining the sample's original physical characteristics
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The ionic liquid effectively prevents charge-up, enabling high-resolution imaging and maintaining the sample's original shape, even under vacuum conditions, thereby improving the observation process for both SEM and TEM.
Implementation Method 1
an ionic liquid which is non-volatile and imparts electrical conductivity
Implementation Method 2
an ionic liquid which is non-volatile and imparts electrical conductivity
Data Source
AI summary
An object of the present invention is to provide a medium; a specimen; a method for preparing the specimen; a method for observing the specimen; a sample cell; and an electron microscope capable of easily solving the problem of charge-up and further capable of observing a real shape or the like of a sample with a SEM, a TEM or the like. For the purpose of achieving the above-described object, the present invention uses an electrical conductivity-imparting liquid medium, for use in a microscope, which includes an ionic liquid as an essential component thereof and is impregnated into the entirety of a SEM or TEM sample or applied to the observation surface of a SEM or TEM sample to impart electrical conductivity at least to the observation surface of the sample. According to the present invention, the charge built up on the sample surface can be released simply by impregnating or coating the sample with the ionic liquid, and hence the problem of charge-up can be easily solved. Further, even when a sample impregnated or coated with the ionic liquid is placed under vacuum, the ionic liquid is not evaporated from the sample, and hence a biological sample can be observed as it is in an original shape.