Ionic Liquid Circulation Layout for Ultra-High Vacuum Chambers
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Solution Overview
Problem
Existing liquid circulation systems face challenges in continuously circulating ionic liquids in vacuum environments, particularly in ultra-high vacuum settings required for semiconductor manufacturing, due to the complexity and cost of fluid bearings and the potential for vacuum degradation by magnetic bearings.
Innovation Solution
A liquid circulation system comprising a storage tank, a viscosity pump, and a pipe configuration that allows for continuous circulation of ionic liquids in a vacuum, using gravity to supply the liquids and deaerate them, eliminating the need for differential pressure seals and reducing system size and cost.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If fluid bearings are used to support the rotating shaft in vacuum, then bearing performance is improved, but system complexity and cost increase
Solution Approach 1:
The patent replaces complex mechanical fluid bearing systems with a simpler magnetic bearing system. The magnetic bearing uses magnetic fields to support the rotating shaft, eliminating the need for complex fluid supply and pressure control mechanisms while maintaining reliable operation in vacuum environments.
Solution Approach 2:
The patent introduces magnetic fields as an intermediary to replace direct mechanical contact in fluid bearings. The magnetic field acts as a non-contact mediator that provides bearing support without requiring complex fluid supply systems, thereby reducing overall system complexity.
2Device complexity
If magnetic bearings are used to support the rotating shaft in vacuum, then system complexity is reduced, but vacuum degradation occurs
Solution Approach 1:
The patent extracts the magnetic bearing system from the vacuum chamber environment and places it in a separate drive chamber. This separation prevents magnetic field interference and potential vacuum degradation while maintaining the benefits of reduced system complexity. The magnetic bearing operates in the drive chamber while the rotor operates in the vacuum chamber.
3Object-affected harmful factors
If differential pressure seals are used to maintain vacuum, then vacuum integrity is preserved, but system size and cost increase
Solution Approach 1:
The patent replaces mechanical differential pressure seal systems with a magnetic coupling system. The magnetic coupling transfers rotational force across the vacuum boundary without physical contact or pressure differential requirements, thereby maintaining vacuum integrity while reducing system size and eliminating complex sealing mechanisms.
Solution Approach 2:
The patent uses magnetic fields as an intermediary to transmit rotational motion across the vacuum boundary without requiring physical seals or pressure differentials. The magnetic coupling acts as a non-contact mediator that maintains vacuum integrity while enabling power transmission.
4Productivity
If ionic liquid is circulated in vacuum using conventional pumps, then liquid supply is achieved, but vacuum contamination occurs
Solution Approach 1:
The patent extracts the pump system from the vacuum environment and places it in a separate drive chamber. The ionic liquid is circulated through sealed magnetic coupling mechanisms that prevent vacuum contamination while maintaining continuous liquid supply to the bearing in the vacuum chamber.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables continuous circulation of ionic liquids in ultra-high vacuum environments, simplifying the mechanism, reducing size and cost, and maintaining liquid quality by avoiding contact with gases, thus enhancing processing accuracy and reducing replacement frequency.
Implementation Method 1
a viscosity pump provided below the storage tank in a vertical direction... The rotor rotates, and the pipe supplies the ionic liquid inside the storage tank into the vacuum chamber
Implementation Method 2
using gravity to supply the liquids and deaerate them
Data Source
AI summary
A liquid circulation system according to an aspect of the present disclosure is for recovering an ionic liquid supplied into a vacuum chamber and returning the recovered ionic liquid back again into the vacuum chamber, and includes a storage tank having an opening communicating with an inside of the vacuum chamber and configured to store the ionic liquid recovered from the inside of the vacuum chamber through the opening, a viscosity pump provided below the storage tank in a vertical direction, and a pipe configured to supply the ionic liquid inside the storage tank into the vacuum chamber.