Ionized Air Workpiece Holding for Thin Suspension Inspection

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Solution Overview

Problem

Existing workpiece holding devices struggle to securely hold thin and slender workpieces like disk drive suspensions, particularly due to static charging and warping issues, which can lead to incorrect imaging during inspection.

Innovation Solution

A workpiece holding device with a workpiece placement table, suction holes, a blow suction unit, and a movement mechanism, along with an optional ionizer, to securely hold and stabilize the workpiece by ionized air jets and suction, ensuring proper positioning and imaging.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If a suction device is used to hold the workpiece, then the workpiece can be secured to the mount surface by negative pressure, but the workpiece may separate from the suction stage or warp due to static electricity

Engineering Contradiction:
Improveworkpiece holding stabilityVSAvoidstatic electricity effect
Core Design Contradiction:
ReliabilityVSObject-affected harmful factors

Solution Approach 1:

The invention uses the static electricity that causes problems by introducing a grounded metal plate near the workpiece. The grounded plate attracts the statically charged workpiece through electrostatic attraction, converting the harmful static charge into a beneficial holding force that complements the suction device's negative pressure holding mechanism.

Inventive Principle:
Principle #22Blessing in disguise (Convert harm into benefit)

Solution Approach 2:

The invention introduces a grounded metal plate as an intermediary between the suction device and the workpiece. This metal plate serves as a mediator that provides additional electrostatic attraction to hold the workpiece, while also providing a discharge path for static electricity, thus resolving the conflict between holding stability and static electricity effects.

Inventive Principle:
Principle #24Intermediary (Mediator)

2Device complexity

If the workpiece is held by negative pressure alone, then the structure remains simple, but the workpiece cannot be securely held when charged with static electricity

Engineering Contradiction:
Improveholding device structureVSAvoidworkpiece adhesion
Core Design Contradiction:
Device complexityVSReliability

Solution Approach 1:

The invention merges two different holding mechanisms: the suction device that provides negative pressure holding and the grounded metal plate that provides electrostatic attraction. By combining these two approaches, the system achieves reliable workpiece holding even when the workpiece is charged with static electricity, without requiring a completely complex redesign.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The invention changes the physical parameters of the holding system by introducing a conductive metal plate with ground connection. This adds a new parameter (electrostatic attraction force) to the holding mechanism, enabling the system to adapt to workpieces with static charge while maintaining structural simplicity.

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The device effectively prevents workpiece detachment and warping, allowing for secure holding and efficient inspection of thin and slender workpieces by ensuring proper adhesion and stabilization during imaging processes.

Implementation Method 1

The negative pressure generating source is connected to the suction hole and suctions air through the suction hole

Methodology Applied
Scientific EffectNegative pressure: Pressure Gradient

Implementation Method 2

The jet outlet blows gas (for example, air) from above the workpiece toward the workpiece placed on the workpiece support surface

Methodology Applied
Scientific EffectGas jet: Jet

Data Source

PatentUS12551989B2Workpiece holding device and inspection device comprising workpiece holding device
Publication Date: 2026.02.17 NHK SPRING CO LTD
  • US12551989B2 patent drawing
  • US12551989B2 patent drawing
  • US12551989B2 patent drawing

AI summary

A workpiece holding device includes a workpiece support surface and a blow suction unit. The workpiece support surface includes suction holes formed therein. A workpiece placed on the workpiece support surface is adsorbed by the suction holes. The blow suction unit includes an ionizer that ionizes gas (for example, air), a jet outlet that jets the gas toward the workpiece and a suction inlet. The gas blown onto and reflected off the workpiece is suctioned through the suction inlet. While blowing the ionized gas onto the workpiece, the blow suction unit is moved relative to the length direction of the workpiece.